Device for detecting thickness of electrolyte plasma polishing anode gas film and detection method thereof
A plasma and electrolyte technology, applied in electric/magnetic thickness measurement, electromagnetic measurement devices, etc., can solve the problems of unclear influencing factors, affecting material removal rate and processing effect, etc. Effect
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[0034] Such as figure 1 As shown, a device for monitoring the gas film thickness of an electrolyte plasma polishing anode is composed of an anode fixture 1 , a gas film thickness measuring patch 2 , and a voltage measuring instrument 3 . The anode fixture and the air film thickness measuring patch are bonded and connected with high-strength insulating glue, and the fine conductive wire 23 (50-100 microns in diameter) is connected with the voltage measuring instrument 3 through the wire 25 . The corresponding device numbers (0, 1, 2, 3...) on the voltage tester (the measurable voltage range is 0-1500V) correspond to each fine conductive wire laid side by side.
[0035] Such as figure 2As shown, the air film thickness measuring patch 2 is composed of a fine conductive wire 23 and two pieces of mica sheets 22 (thickness 0.5-2 mm) used to clamp the fine conductive wire. The fine conductive wires are coated with insulating varnish, and are laid side by side with numbers (0, 1, 2...
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