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Sensitivity-adjustable flexible tactile sensor capable of accurately positioning stress

A tactile sensor, precise positioning technology, applied in the direction of instruments, measuring force, measuring devices, etc., to achieve the effect of precise force positioning, easy sensitivity, and prevention of crosstalk

Active Publication Date: 2021-03-30
HANGZHOU DIANZI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although previous work has shown high performance with sufficient flexibility and transparency, these devices still suffer from the limitations of conventional piezoresistive and resistive tactile sensors

Method used

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  • Sensitivity-adjustable flexible tactile sensor capable of accurately positioning stress
  • Sensitivity-adjustable flexible tactile sensor capable of accurately positioning stress
  • Sensitivity-adjustable flexible tactile sensor capable of accurately positioning stress

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] A method for manufacturing a sensitivity-adjustable capacitive flexible tactile sensor that can realize precise force positioning. The structure of the bosses on the dielectric layer is: the diameter of the bosses is 70 μm, the spacing between the bosses is 35 μm, and the angle between the bosses is 30°, including Follow the steps below:

[0045] (1) First prepare the graphene / PDMS film;

[0046] Put the germanium (110) substrate into the furnace, pass in hydrogen and argon or nitrogen to protect and heat to about 1000°C, stabilize the temperature, and keep it for about 20 minutes; then stop feeding the protective gas, and switch to carbon source (such as methane) Gas, about 30 minutes, the reaction is complete; cut off the power supply, turn off the methane gas, and then pass through the protective gas to exhaust the methane gas, until the tube is cooled to room temperature under the protective gas environment, take out the germanium (110) substrate, and obtain the ger...

Embodiment 2

[0062] A method for manufacturing a sensitivity-adjustable capacitive flexible tactile sensor that can realize precise force positioning. The structure of the bosses on the dielectric layer is: the diameter of the bosses is 85 μm, the spacing between the bosses is 20 μm, and the angle between the bosses is 30°, including Follow the steps below:

[0063] (1) First prepare the graphene / PDMS film;

[0064] Put the germanium (110) substrate into the furnace, pass in hydrogen and argon or nitrogen to protect and heat to about 1000°C, stabilize the temperature, and keep it for about 20 minutes; then stop feeding the protective gas, and switch to carbon source (such as methane) Gas, about 30 minutes, the reaction is complete; cut off the power supply, turn off the methane gas, and then pass through the protective gas to exhaust the methane gas, until the tube is cooled to room temperature under the protective gas environment, take out the germanium (110) substrate, and obtain the ger...

Embodiment 3

[0081] A method for manufacturing a sensitivity-adjustable capacitive flexible tactile sensor that can realize precise force positioning. The structure of the bosses on the dielectric layer is: the diameter of the bosses is 70 μm, the spacing between the bosses is 70 μm, and the angle between the bosses is 30°, including Follow the steps below:

[0082] (1) First prepare the graphene / PDMS film;

[0083] Put the germanium (110) substrate into the furnace, pass in hydrogen and argon or nitrogen to protect and heat to about 1000°C, stabilize the temperature, and keep it for about 20 minutes; then stop feeding the protective gas, and switch to carbon source (such as methane) Gas, about 30 minutes, the reaction is complete; cut off the power supply, turn off the methane gas, and then pass through the protective gas to exhaust the methane gas, until the tube is cooled to room temperature under the protective gas environment, take out the germanium (110) substrate, and obtain the ger...

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Abstract

The invention discloses a sensitivity-adjustable flexible tactile sensor capable of accurately positioning stress The flexible tactile sensor comprises a PDMS flexible substrate, a graphene electrodeand a PDMS microstructure dielectric layer. The structure of the flexible tactile sensor is divided into an upper layer, a middle layer and a lower layer; the upper layer is a PDMS and patterned graphene electrode mixed layer; the middle layer is a PDMS microstructure dielectric layer formed in a microstructure silicon mold through pouring; the structure and the material of the lower layer are thesame as those of the upper layer; and the lower layer is defined in space in a mode that the upper layer rotates by 90 degrees in the horizontal plane after being overturned. The sensor is mainly composed of the PDMS material and the graphene material; the PDMS material is uniformly selected as a substrate and a dielectric material, so that the flexible bending and stretching characteristics of the sensor can be ensured to the maximum extent, and the sensor can be installed on manipulators with different radians; and based on the characteristic that accurate stress positioning can be achieved, the sensor can be installed on an insole and the like to capture and analyze the position of a human physiological signal through a stressed area.

Description

technical field [0001] The invention relates to the field of flexible tactile sensors, and relates to a flexible tactile sensor with precise positioning force and adjustable sensitivity; the sensor uses graphene as an electrode and a flexible material as a substrate, and innovates the arrangement of dielectric layer bosses to achieve high sensitivity And the influence of force outside the monitoring area can be excluded. Background technique [0002] Information technology in today's society is changing with each passing day. New technologies such as the Internet, cloud computing, big data, and artificial intelligence are flooding every corner of society. Intelligent robots, household appliances, vending machines, mobile phones, computers and various media carriers in industrial production and daily life have started a "tactile revolution". The sense of touch is caused by pressure and traction acting on the receptors on the surface of the organism, and it is one of the imp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14
CPCG01L1/146
Inventor 董林玺吴宣邑杨伟煌刘超然
Owner HANGZHOU DIANZI UNIV
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