Vacuum system for controlling flexible CIGS film reactive sputtering plume
A vacuum system and thin film technology, applied in sputtering coating, vacuum evaporation coating, metal material coating process, etc. The effect of speeding up the vacuuming speed and controlling the stability
Pending Publication Date: 2021-04-09
ZHEJIANG SHANGYUE OPTOELECTRONICS TECH
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Problems solved by technology
[0005] The present invention provides a kind of vacuum system structure of flexible CIGS thin film reactive sputtering plume control with good plume state, strong controllability for sputtering of different materials, and good uniform coating effect; solves the problem of existing There is a technical problem in the technology that the sputtering plume is unstable, the coating is uneven, and the controllability of sputtering for different materials is poor
[0006] At the same time, the present invention also provides a vacuum system with a short vacuum speed and a stable vacuum state for a flexible CIGS thin film reactive sputtering plume control; Unstable technical issues
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[0023] Such as figure 1 and 2 Shown in and 3, a kind of vacuum system of flexible CIGS thin film reaction sputtering plume control, comprises cavity 1, once arranged in cavity 1 all has unwinding roll 5, oil temperature drum 2 and winding roll 6, unwinding A transmission roller 4 is connected between the roller 5, the oil temperature drum 2 and the winding roller 6. A fixing bar is arranged on the bottom plate of the oil temperature drum 2, and a card slot is provided on the fixing bar, and a card edge 20 matched with the card slot is provided on the copper cover 7. The flexible coiled material 8 passes through the unwinding roller 5, the driving roller 4, the copper cover 7, the oil temperature drum 2 and the winding roller 6 successively to form a winding and unwinding state.
[0024] A vacuum system is formed in the cavity 1 , and the vacuum system includes a roughing pump group 11 , a molecular pump 9 , a cold trap 3 , a backing pump 12 , a cold pump 21 and a composite v...
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The invention relates to treatment equipment for a solar cell. A vacuum system for controlling flexible CIGS film reactive sputtering plume comprises a cavity, wherein an oil temperature drum is arranged in the cavity, a plurality of copper covers are arranged below the oil temperature drum, a coiled material channel is arranged between the copper covers and the oil temperature drum, the side, facing a coiled material, of each copper cover is provided with an opening, a target material and an air guide pipe are arranged in each copper cover, a gas flowmeter is connected to each air guide pipe, and an air hole is formed in each air guide pipe. The invention provides a vacuum system structure for controlling flexible CIGS film reactive sputtering plume, which is good in formed plume state, high in controllability for sputtering of different materials and good in coating uniformity effect; and the technical problems of unstable sputtering plume, non-uniform coating and poor controllability for sputtering of different materials in the prior art are solved.
Description
technical field [0001] The invention relates to a solar cell processing device, in particular to a magnetron sputtering vacuum device for a flexible copper indium gallium selenide thin film solar thin film cell. Background technique [0002] Today's global photovoltaic market is dominated by crystalline silicon solar cells, but the rapid consumption of energy resources caused by high-energy-consuming production processes will make society unbearable and will also restrict the larger-scale development of the photovoltaic industry. Therefore, the development of low-cost, new thin-film solar cells is an inevitable trend of the future international photovoltaic industry. [0003] High-efficiency thin-film solar cells with copper indium gallium selenide as the absorbing layer are collectively referred to as copper indium gallium selenide cells (CIGS cells). As a flexible solar cell, CIGS thin film solar cells are characterized by high technical requirements, portability, and no l...
Claims
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Login to View More IPC IPC(8): C23C14/06C23C14/35C23C14/54C23C14/56
CPCC23C14/0036C23C14/0623C23C14/35C23C14/54C23C14/56
Inventor 于金杰任宇航罗明新马林
Owner ZHEJIANG SHANGYUE OPTOELECTRONICS TECH