Metal part of processing chamber and method of forming layer of metal part of processing chamber
A technology for metal parts and processing chambers, applied in metal material coating process, superimposed layer plating, coating and other directions, can solve the problem of damage to the substrate, cannot fully solve the problem of ensuring the thickness of the surface treatment layer, and reducing the production yield.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0087] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention and methods for achieving them will become apparent with reference to the accompanying drawings and the embodiments to be described in detail below. However, the present invention is not limited to the embodiments described here, and may also be embodied in forms different from each other. Rather, the embodiments described herein are provided so that the disclosed content may become thorough and complete and fully convey the idea of the present invention to those skilled in the art, and the present invention is only defined by the scope of the claims . Throughout the specification, the same reference signs refer to the same constituent elements.
[0088] The terms used in this specification are for describing the embodiments and are not intended to limit the present invention. In th...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com