35 results about "Equivalent series inductance" patented technology

The utility model relates to an electric control assembly and a vehicle. The electric control assembly comprises a power module and a capacitor. The positive terminal and the negative terminal of the power module each comprise a first horizontal lead-out part parallel to the power module body. The main body parts of the first horizontal lead-out parts of the positive terminal and the negative terminal of the power module are completely stacked and arranged at intervals; the positive terminal of the power module is welded with the positive terminal of the capacitor, and the negative terminal of the power module is welded with the negative terminal of the capacitor. By adopting a welding mode, the strength of the welding position between the terminals is increased, the vibration durability and reliability are enhanced, the contact resistance between the terminals is reduced, and the thermal risk is reduced. And the positive and negative terminals of the power module do not need to be staggered and avoided for mounting screws, so that the main body parts of the first horizontal lead-out parts of the positive and negative terminals of the power module can be completely stacked, the equivalent series inductance between the positive and negative terminals is reduced, the switching loss of the power module is reduced, and the working efficiency is improved.

The utility model relates to the related technical field of power electronics, in particular to a non-standard motor controller for a vehicle, which comprises a power module mechanism, a fixing screw (2) is arranged on the surface of one side of the power module mechanism, and a capacitor module mechanism is arranged on the surface of one side of the fixing screw. According to the design scheme, before the power module and the DC-Link are combined, the power module and the DC-Link can be independently detected, and after the power module and the DC-Link are ensured to be qualified, the power module and the DC-Link are combined, so that the requirement of independently detecting the power module and the DC-Link capacitor is met, and meanwhile, after the power module and the DC-Link capacitor are combined, the requirements of extremely small ESL (equivalent series inductor) performance and compact product size of a product are met; and the rejection rate / rejection cost of the product is correspondingly reduced.

The utility model provides a three-dimensional capacitor structure. The three-dimensional capacitor structure provided by the utility model comprises a substrate, at least one stacked structure, an isolation layer, a first electrode and a second electrode, wherein the at least one stack structure is formed on the substrate; the first side face and the second side face of each stacking structure in the at least one stacking structure are of a step-shaped structure. Each stacked structure comprises n + 1 electrode layers and n dielectric layers which are alternately stacked, and n is a positive integer; the isolation layer is formed on the at least one stack structure and forms a plane with the at least one stack structure; a first electrode wire group and a second electrode wire group are formed in the isolating layer; the first electrodes are communicated with the odd-level electrode layers on the first side surface and the second side surface of each stacked structure through first electrode wire groups; and the second electrode is communicated with the even-numbered electrode layers on the first side surface and the second side surface of each stacked structure through a second electrode wire group. The three-dimensional capacitor structure provided by the utility model can reduce equivalent series inductance.

A multilayer electronic component includes a laminated portion, wherein a first internal electrode and a second internal electrode are alternately arranged in the lamination direction. A first set of external electrodes is disposed on at least one of a pair of opposing main surfaces of the laminated portion. These external electrodes are arranged adjacent to an edge and electrically connected to the first internal electrode, wherein side surfaces of the laminated portion are abutted at the edge. A second set of external electrodes is also disposed on at least one main surface, located in the lateral direction between the first set of external electrodes, and electrically connected to the second internal electrode. Via electrodes penetrate the laminated portion in the lamination direction, thereby electrically connecting the second internal electrode to the second set of external electrodes. This structure enables multiple current paths and reduces the current loop length, thereby reducing the equivalent series inductance and improving the high-frequency characteristics of the component.

The utility model discloses a novel sheet type multilayer ceramic capacitor relates to capacitor technical field, including two end electrodes, the inside electrode subassembly is arranged between one side of two end electrodes, the inside electrode subassembly includes a plurality of first base plate, second base plate and ceramic dielectric layer, a plurality of ceramic dielectric layer is arranged between one side of two end electrodes, and a plurality of ceramic dielectric layer is all provided with first base plate or second base plate between two two, first base plate and second base plate are staggered distribution, the top one side of first base plate and second base plate all embeds and is installed with the conducting strip. The utility model discloses through carrying out three -dimensional interdigital electrode design, shortens the current path, reduces equivalent series inductance to 0.05nH below, adapts 5G / 6G high frequency communication scene, reduces signal reflection and energy loss, in addition still improved the heat dissipation capacity under high frequency, and reduced the fracture risk.

To enable efficient dissipation of heat generated in a capacitor element and reduction of equivalent series inductance (ESL) with a simple configuration.SOLUTION: A proximity portion 25 is provided on a first bus bar 2, and the proximity portion 25 is disposed closer to an inner surface (lower surface) of a case 5 than a main body portion 20 and an electrode connection portion 24. In addition, the electrode connection portion 24 of the first bus bar 2 is disposed at a position closer to an external connection terminal portion 22. Accordingly, heat generated by a capacitor element 10 can be dissipated via the proximity portion 25 disposed close to the inner surface of the case, and an increase in equivalent series inductance (ESL) can be suppressed.SELECTED DRAWING: Figure 7

The application discloses a motor controller, a power drive system and a vehicle, and relates to the technical field of electronics. The motor controller comprises a power device module, a capacitor module and an electrical connection assembly. The electrical connection assembly is a flexible structural member. The electrical connection assembly comprises a first conductive member and a second conductive member. The first conductive member and the second conductive member are coupled to each other. The first conductive member is electrically connected to the power device module and the capacitor module respectively. The second conductive member is electrically connected to the power device module and the capacitor module respectively. The embodiment of the application can solve the problem of a large equivalent series inductance.

The invention belongs to the technical field of filter capacitor detection, and provides a fault detection method and system for a filter capacitor, and the method comprises the steps: determining a current abnormal frequency band corresponding to a high and low frequency filtering combination of different low frequency equivalent series inductors; determining a frequency-ripple current coupling relation of high and low frequency filtering combinations of different low-frequency equivalent series inductors in a current abnormal frequency band; judging whether a ripple current fault occurs or not, if so, judging whether filter capacitor fault depth tracking is needed or not through low-frequency equivalent series inductance change of a current high-low frequency filter combination and comparison of a current frequency band and a current abnormal frequency band, and if so, judging whether the filter capacitor fault depth tracking is needed through the frequency band and the ripple current in a ripple current fault time period. And matching verification of a frequency-ripple current coupling relationship is carried out to determine whether the ripple current fault of the high-frequency filter capacitor is caused by one-way fault transfer between the high-frequency filter combination and the low-frequency filter combination, so that the fault diagnosis accuracy of the filter capacitor is improved.

The utility model relates to the technical field of capacitors, in particular to a metallized polypropylene film capacitor, which comprises a main body, a low-inductance electrode assembly, a heat dissipation assembly and a packaging shell, the main body comprises metallized polypropylene films and metal electrode layers, and the main body is formed by alternately stacking multiple layers of metallized polypropylene films and metal electrode layers. An electrode material of the low-inductance electrode assembly adopts a copper-silver alloy, the low-inductance electrode assembly is welded on the main body, the low-inductance electrode assembly adopts a planar electrode, the heat dissipation assembly is arranged between the main body and the packaging shell, the heat dissipation assembly comprises a heat dissipation sheet and heat conduction silica gel, the heat dissipation sheet adopts a high-heat-conductivity aluminum alloy material, and the heat conduction silica gel is arranged in the heat dissipation sheet. And the heat-conducting silica gel is filled among the radiating fins, the main body and the packaging shell. According to the utility model, through the optimization design of the laminated structure of the main body and the low-inductance electrode structure, the equivalent series inductance is greatly reduced, and the performance of the capacitor in a high-frequency environment is remarkably improved.

The invention relates to the technical field of battery energy storage, and discloses a modular multilevel energy storage system of distributed series inductors, which is connected with a three-phase power grid and comprises three phase units and an alternating current switch, and the three phase units and the alternating current switch are respectively connected to form a triangular energy storage system or a Y-shaped energy storage system; wherein the three phase units are respectively an A phase unit, a B phase unit and a C phase unit; each phase unit comprises a plurality of energy storage modules which are connected in series, and each energy storage module comprises a full-bridge unit and a battery module; a direct current port of the full-bridge unit is connected with the battery module, an alternating current port is connected with a three-phase power grid, and the full-bridge unit is used for achieving direct current and alternating current power transmission and conversion functions. By controlling the logic combination of the full-bridge semiconductor power device and the bypass switch, the adjustment of the equivalent series inductance value of the phase unit is realized, and the flexibility of the control system is improved.

The invention provides a three-dimensional core particle packaging structure and a manufacturing method, and relates to the technical field of integrated circuit manufacturing. Comprising a first substrate; the reinforcing rib structure is arranged on the first substrate and is electrically connected with the first substrate; a capacitor assembly is arranged in the reinforcing rib structure; the core particle stacking structure is arranged between the first substrate and the reinforcing rib structure, and the core particle stacking structure is electrically connected with the reinforcing rib structure and the first substrate; the core particle stack structure includes at least one core particle. According to the invention, the overall physical stability and mechanical structural strength of the package can be improved, the package size is reduced, the equivalent series inductance is remarkably reduced, the high-frequency power supply noise is effectively suppressed, the defect of capacitor design in the core particles is overcome, the effective wiring space of the substrate is greatly saved, the wiring difficulty of the substrate is reduced, and the production cost is reduced. And meanwhile, the problem that the packaging size is increased due to external arrangement of the capacitor is avoided.

To reduce the current circuits of a multilayer electronic component, improve high-frequency characteristics, minimize the bottleneck part of an internal electrode in the area where an internal electrode and an external electrode are in contact with each other to improve equivalent series resistance and equivalent series inductance, uniformly coat the internal electrode to reduce errors which occur in the manufacturing processes, and improve the reliability of the multilayer electronic component.SOLUTION: A multilayer electronic component 100 according to an embodiment of the present invention includes: an octahedral body 110 including a dielectric layer and an internal electrode; and an external body arranged on the body. The internal electrode includes: a first internal electrode in contact with a first angle surface C1 and a third angle surface C3; and a second internal electrode in contact with a second angle surface C2 and a fourth surface C4. The external electrode includes: a first external electrode 131 and a third external electrode 133 arranged in the first angle surface and in the third angle surface to be in contact with the first internal electrode; and a second external electrode 132 and a fourth external electrode 134 arranged in the second angle surface and in the fourth angle surface to be in contact with the second internal electrode.SELECTED DRAWING: Figure 1

The utility model relates to a winding structure filter, including a winding copper busbar assembly, a grounding capacitor assembly, a filter bracket assembly and a magnetic ring. The winding copper busbar assembly and the grounding capacitor assembly are installed on the filter bracket assembly. One end of the grounding capacitor assembly is connected to the winding copper busbar assembly, and the other end is connected to the filter bracket assembly. The magnetic ring passes through the winding copper busbar assembly; the winding copper busbar assembly is a flat copper wire laminated arrangement structure. Compared with the prior art, the utility model has the advantages of adopting a winding copper busbar assembly with a flat copper wire laminated arrangement structure to increase the inductance and improve the filtering performance of the filter, and improve the ability of the filter to suppress differential mode noise; the winding copper busbar assembly passes through the same magnetic ring, which strengthens the ability of the filter to suppress differential mode noise; the structure of the first grounding capacitor back to the second grounding capacitor makes the filter structure compact, shortens the equivalent series inductance of the capacitor absorption loop, and thus improves the high-frequency noise suppression performance of the filter.

The invention discloses a reactive compensation-oriented capacitor life monitoring method, system and device, and relates to the technical field of capacitor testing. The method comprises the steps of periodically collecting an original data set; performing multi-frequency point selection in the power grid to obtain a plurality of multi-frequency points, and calculating to obtain complex impedance and admittance corresponding to each multi-frequency point; based on the complex impedance corresponding to each multi-frequency point, calculating to obtain estimated values of equivalent series resistance, equivalent series inductance and capacitance, and performing consistency verification by using admittance; based on the estimated values of the operation time, the equivalent series resistance, the equivalent series inductance and the capacitor capacity, the degradation degree of the capacitor is judged; calculating a comprehensive life consumption rate based on the original data set; based on the degradation degree of the capacitor, correcting the comprehensive life consumption rate to obtain the corrected comprehensive life consumption rate, and obtaining the health state of the capacitor; according to the invention, the capacitance degradation degree can be judged, so that the service life consumption rate is more suitable for the actual aging process after being corrected.

The invention relates to the technical field of integrated passive elements, in particular to a deep groove capacitor and a manufacturing method of the deep groove capacitor, a positive plate and a negative plate of the capacitor are located on the two side walls of a deep groove respectively, and electrode layers and dielectric layers are alternately stacked in the deep groove to form a staggered multi-layer structure. And the adjacent electrode layers are alternately and electrically connected with the positive plate or the negative plate. According to the invention, the highest capacitance density and more excellent ESR (equivalent resistance) and ESL (equivalent inductance) performance in similar capacitors can be realized. The appearance size of the capacitor can be reduced, the integration level of the device is improved, and the increasingly stringent miniaturization requirement of the advanced packaging technology is met. And extremely high working frequency and ultra-wide decoupling bandwidth can be realized, and increasingly high requirements of an integrated circuit on power supply integrity can be met. And the design is flexible, and capacitors with different capacitance values can be flexibly produced for various application scenes.

The utility model discloses a kind of trench capacitor unit and capacitor chip.The trench capacitor unit includes trench array group extending alternately along transverse direction, vertical direction, insulating layer, four layers of polar plate, and three layers of dielectric layer between polar plate, first, second, third, fourth polar plate contact via, and first, second metal layer and first via layer between it leading out capacitor first, second port.The capacitor chip is composed of the trench capacitor unit array, and the direction of the trench capacitor unit array is adjusted based on the windowing position of the capacitor chip.The utility model utilizes multilayer stack structure, and optimized polar plate, contact via and metal interconnection structure arrangement, can form capacitor chip with high density and low equivalent series inductance, and the capacitor chip can be applied to different package size types.

The present application provides a semiconductor capacitor, an array and a method for preparing the same, wherein the semiconductor capacitor comprises a substrate, the substrate being a heavily doped semiconductor material; a first electrode plate, the first electrode plate being directly disposed on the back of the substrate; a first conductive layer, a first dielectric layer and a second electrode plate being sequentially stacked on the front of the substrate; wherein the resistivity of the first conductive layer is less than that of the substrate. The semiconductor capacitor, the array and the method for preparing the same provided by the present application can further reduce the equivalent series inductance of the capacitor when the product is miniaturized and has a high capacitance.

To provide a miniaturized stacked electronic component having low ESL (Equivalent Series Inductance) and low ESR (Equivalent Series Resistance). [Solution] The stacked electronic component includes a body 110 including a dielectric layer 111 and internal electrodes 121, 122, and electrodes 131, 133 that penetrate the body and are arranged on the body and connected to the internal electrodes. The electrodes include first electrode layers 131a, 133a arranged on the body and mainly composed of a first conductive metal, second electrode layers 131b, 133b arranged to penetrate the body and be in contact with the electrodes and mainly composed of a second conductive metal, and third electrode layers 131c, 133c that are in contact with the second electrode layers, penetrate the body and are arranged across the first electrode layers and mainly composed of a third conductive metal. The second and third conductive metals may be different metals from each other.

The present invention provides an inner series type edge thickened high sheet resistance safety metallized pair film, which includes a middle-edge-retained safety film and a double-edge-retained safety film disposed on the middle-edge-retained safety film. The double-edge-retained safety film includes a first base film, a retained-edge area is provided on one side of the first base film, a first metal coating is plated on the first base film, and a first low sheet resistance area, a first middle sheet resistance area, and a first high sheet resistance area are symmetrically arranged about the central axis on the first metal coating; the middle-edge-retained safety film includes a second base film, a second metal coating is plated on the second base film, an inner series edge gap for longitudinally separating the second metal coating is arranged in the middle of the second metal coating, and a second high sheet resistance area, a second middle sheet resistance area, and a second low sheet resistance area are symmetrically arranged about the inner series edge gap on the second metal coating. The present invention adopts a safety gate protection design for safety protection, and the performance of the capacitor is more reliable and safe; adopts a high sheet resistance design, and the self-healing performance of the capacitor is better; by setting an inner series type structure, the nominal voltage of the component is higher, and the equivalent series resistance and equivalent series inductance are extremely low; the heat generation of the component is relatively small.

The invention discloses a preparation method of a deep trench capacitor structure based on RDL wiring, and the method comprises the following steps: S1, providing a deep trench capacitor structure which comprises at least two conductive layers with different potentials, and the upper surfaces of the conductive layers are covered by a first interlayer dielectric layer; s2, patterning the first interlayer dielectric layer to form via holes exposing different conductive layers; s3, a first redistribution layer is prepared on the first interlayer dielectric layer, the first redistribution layer comprises two electrode layers which are electrically isolated from each other, the two electrode layers are connected to conductive layers with different potentials respectively, patterns of the at least two electrode layers are alternately arranged on a plane in an interdigital shape or a spiral shape, and the patterns of the at least two electrode layers are arranged on the surface of the first interlayer dielectric layer; therefore, a planar capacitor structure connected in parallel with the deep groove capacitor is formed. According to the invention, the interdigital capacitor is connected in parallel on the basis of the MIM capacitor to form a composite capacitor structure, the advantage of high capacitance density of the DTC is maintained, the equivalent series inductance is reduced, and the working bandwidth of the capacitor is expanded.

The utility model discloses a flattened film capacitor core arrangement and copper bar structure, which comprises a small copper bar, two welding areas are arranged on the small copper bar, a plurality of grooves are arranged on the small copper bar, the small copper bar which can be subjected to electric resistance welding with a capacitor core is added, and after the small copper bar is subjected to electric resistance welding with a capacitor, the small copper bar can be subjected to electric resistance welding with the capacitor core. According to the utility model, the capacitor is welded with the large laminated copper bar, so that the flexibility of capacitor placement can be improved, the size flattening can be realized, the ESL (equivalent series inductance) can be reduced, the thin-film capacitor core can be flatly laid on the structure of the surface of the copper bar, the positive and negative copper bars adopt the laminated structure, the electrical characteristics of the controller can be improved, and the overall thickness can be reduced.

The present application relates to the technical field of capacitors, and provides a capacitor and an electronic device. The capacitor comprises a carrier plate and a capacitor body. A first side of the carrier plate in the thickness direction thereof is provided with a positive electrode lead-out end, a negative electrode lead-out end, and an auxiliary lead-out end. The capacitor body is arranged on a second side of the carrier plate in the thickness direction thereof. The first side and the second side are opposite to each other in the thickness direction of the carrier plate. The capacitor body comprises a positive electrode and a negative electrode. The positive electrode lead-out end is connected to the positive electrode. The negative electrode lead-out end and the auxiliary lead-out end are both connected to the negative electrode. In the direction of extension of the carrier plate, the distance between the auxiliary lead-out end and the positive electrode lead-out end is smaller than the distance between the negative electrode lead-out end and the positive electrode lead-out end. The capacitor provided by the present application reduces the thickness and size of the capacitor, shortens the current flow path, reduces electrical lead-out resistance and equivalent series inductance, increases the capacitance of the capacitor, and improves the use performance of the electronic device.

A smoothing circuit (10) is provided with a positive electrode wire (11), a negative electrode wire (12), and a first capacitor part (C1) and a second capacitor part (C2) connected in parallel between the positive electrode wire and the negative electrode wire. The positive electrode wire has a first positive electrode connection portion (P1) connected to the first capacitor part, and a second positive electrode connection portion (P2) connected to the second capacitor part. The negative electrode wire has a first negative electrode connection portion (N1) connected to the second capacitor part, and a second negative electrode connection portion (N2) connected to the first capacitor part. The positive electrode wire and the negative electrode wire cross each other three-dimensionally. The inductance of the positive electrode wire is substantially equal to the equivalent series inductance of the first capacitor part, and the inductance of the negative electrode wire is substantially equal to the equivalent series inductance of the second capacitor part. The smoothing circuit comprises a snubber circuit (Cs) connected between the positive electrode wire and the negative electrode wire.

The invention relates to a coupler for partial discharge monitoring and a packaging method thereof, the coupler comprises a coupler body, the coupler body comprises a plurality of coupler modules which are stacked up and down and are connected in series, and each coupler module comprises a plurality of cores which are stacked up and down and are connected in parallel; each core comprises an intermediate medium and electrode layers arranged on the two sides of the intermediate medium, and the intermediate medium comprises medium layers and metal layers which are stacked up and down and are alternately arranged. The coupler for partial discharge monitoring is low in equivalent series inductance, high in resonant frequency and resistant to high voltage.

Provided in the embodiments of the present disclosure are an electronic control assembly and a vehicle. The electronic control assembly comprises a power module and a capacitor, wherein a positive terminal and a negative terminal of the power module each comprise a first horizontal lead-out part parallel to the power module body; at least partial regions of main body parts of the first horizontal lead-out parts of the positive terminal and the negative terminal of the power module are stacked and arranged at intervals; and the positive terminal of the power module is welded to a positive terminal of the capacitor, and the negative terminal of the power module is welded to a negative terminal of the capacitor. In the present disclosure, the strength at the position where terminals are welded is increased by means of welding, so that the vibration durability and reliability are enhanced, and the contact resistance between the terminals is reduced, thereby reducing a thermal risk. Moreover, it is not necessary to perform staggered avoidance between positive and negative terminals of a power module in order to mount screws, such that at least partial regions of main body parts of first horizontal lead-out parts of the positive and negative terminals of the power module are stacked, thereby reducing the equivalent series inductance between the positive and negative terminals, and thus decreasing the switching loss of the power module and improving the working efficiency.

This invention provides multilayer ceramic electronic components with low equivalent series inductance (ESL) and improved mountability on circuit boards. [Solution] In the multilayer ceramic capacitor 100, the base body 10 has a laminate 20 in which ceramic layers 21 and internal electrodes 22a and 22b mainly composed of metal are alternately stacked. The base body has a plurality of via conductors 23a and 23b arranged to penetrate the ceramic layers in the stacking direction, with one end extended to the surface of the laminate and electrically connected to the internal electrodes. Terminal electrodes 40a and 40b electrically connected to the via conductors are arranged on the surface from which the ends of the via conductors are extended. The surface from which the ends of the via conductors are extended and the terminal electrodes are arranged is surrounded by a peripheral edge 111 and has a raised structure composed of a raised portion 112 that rises relative to the peripheral edge, and a portion of each terminal electrode is located on the slope of the raised portion.

To minimize equivalent series inductance (ESL) due to the structure of a stacked electronic component.SOLUTION: A stacked electronic component according to an embodiment of the present invention includes a body including a dielectric layer, and a first internal electrode and a second internal electrodes that alternately arranged through the dielectric layers in a first direction, and a first external electrode and a second external electrode that are arranged on surfaces of the body facing each other in a second direction perpendicular to the first direction. The body includes a main part in which the first internal electrode and the second internal electrode are alternately arranged in the first direction, a first cover part arranged over one surface of the main part in the first direction, and a second cover part arranged over the other surface of the main part in the first direction. One of the first cover and the second cover includes a cover electrode having an average measurement in the second direction larger than those of the first internal electrode and the second internal electrode. The cover electrode is arranged adjacent to the one surface or the other surface of the main part in the first direction rather than a surface of the body facing the first direction.SELECTED DRAWING: Figure 2

The application discloses a suspended strip line triplexer and limiter integrated device, and relates to the microwave and radio frequency technical field.The device comprises a suspended strip line triplexer composed of a metal cavity and a suspended dielectric substrate, is provided with one input port and three output ports corresponding to different frequency bands, and is provided with a step impedance resonator group between each port, is connected through parallel plate capacitance, and is further connected through a high impedance thin line equivalent series inductance.The step impedance resonator is used for generating a transmission zero point outside the frequency band.The device is provided with PIN diode limiters at the three output ports, the metal cavity is composed of upper and lower metal cover plates, metal patches on the suspended strip line are connected with the upper and lower metal cover plates through vias, radio frequency grounding is realized, and a limiter PIN diode grounding position is reserved.The application has the advantages of compact structure, multi-frequency band signal separation, interference suppression, interference signal amplitude limitation, improved system reliability and stability, and function expansion.

The invention provides a capacitor on-line health monitoring system and method based on double-path differential sensing and working condition self-adaption, and the system employs a double-path differential current sensing architecture, synchronously measures the current of a total bus and the total current of other parallel branches except a to-be-measured capacitor, and carries out the real-time differential operation. Net ripple current flowing through a specific capacitor bank to be measured is accurately reconstructed, and weak signal extraction with a high signal-to-noise ratio is realized under strong common-mode interference. According to the system, a working condition self-adaptive identification module is introduced to analyze macroscopic electrical parameters in real time and classify operation states, and it is ensured that a high-precision parameter identification algorithm is only triggered under a stable steady-state working condition. In the parameter identification stage, the system uses switch harmonic waves of a converter as a natural excitation source, the equivalent series resistance, capacitance and equivalent series inductance of a capacitor are synchronously solved through multi-frequency-point impedance spectroscopy measurement and nonlinear and least square fitting, and finally online health state evaluation and predictive maintenance are achieved.

The invention belongs to the field of radio frequency matchers, and particularly relates to an accurate calibration method of a radio frequency matcher circuit model. The method comprises the following steps: firstly, establishing an actual equivalent circuit model on the basis of a theoretical radio frequency matcher circuit; based on the model, the parasitic inductance in the circuit is quantized by sequentially calibrating the input interconnection line parasitic inductance L2, the equivalent series inductance LESL1, the fixed inductance L1, the output interconnection line parasitic inductance L3 and the equivalent series inductance LESL2, and the quantized circuit model enables the impedance detector in the radio frequency matcher to accurately detect the real-time impedance. And the design difficulty of the impedance detector of the radio frequency matcher is reduced.