Ferroelectric thin-film capacitor applied to ferroelectric memory
A ferroelectric thin film and memory technology, applied in the field of ferroelectric thin film capacitors, can solve the problems of poor performance, poor performance, and poor leakage current characteristics of PZT ferroelectric capacitors, achieve fatigue and retention performance improvement, reduce aggregation, and improve The effect of the interface
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[0016]In order to make the objectives, technical solutions and advantages of the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely intended to illustrate the invention and are not intended to limit the invention.
[0017]Such asfigure 1An ferroelectric thin film capacitance applied to a ferroelectric reservoir, including a silicon-based layer 1, an upper electrode layer 2, a ferroelectric thin film layer 3, and a lower electrode layer 4, the upper electrode layer 2, an iron electricity The film layer 3 and the lower electrode layer 4 are sequentially disposed on the silicon base layer 1 and is provided between the upper electrode layer 2, and the lower electrode layer 4 and the ferroelectric thin film layer 3 respectively provide a buffer layer 5, respectively, in the buffer layer 5 and iron An isolation layer 6 is ...
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