Diamond-based ultraviolet detector and its preparation method

Abstract

The invention discloses a diamond-based ultraviolet detector, which includes a diamond film, a first electrode, a second electrode and an insulating layer; the diamond film includes a diamond microcolumn, a first groove, a second groove and a third groove, and the diamond The microcolumns are periodically arranged on the surface of the diamond film, and the gap between the diamond microcolumns is the third groove, and the two sides of the third groove are respectively provided with the first groove and the second groove connected with it; the first electrode On the first trench and the third trench; the second electrode is above the second trench and the third trench; the insulating layer is between the stacked area of ​​the first electrode and the second electrode. The invention also discloses a preparation method of the diamond-based ultraviolet detector. The invention utilizes grooves to arrange the stacked first electrode and the second electrode, improves the surface duty ratio of the diamond film, increases the number of carriers and realizes their effective collection, and improves the sensitivity and responsiveness.

Description

Technical field [0001] The present invention relates to a detector and a method thereof, specifically a diamond-based ultraviolet detector and a preparation method thereof. Background technique [0002] The research of diamond thin film UV detector is one of the most attractive topics in the study of UV detector. The banned bandwidth of diamond is 5.5 eV, corresponding to the ultraviolet wavelength of 225 nm, has a daily blind characteristic, which allows the device to be used in the visible light background without having to configure a filter or dielectric coating. Diamond also has many excellent electrical, light, thermal and mechanical properties and high anti-radiation intensity and physical chemical stability, such as low dielectric constants, high breakdown voltage, high electron / hole mobility, high thermal conductivity, etc. Wait. It is the above many features that make diamonds are widely used in detection techniques, especially in the field of high energy particles, X...

AI Technical Summary

Problems solved by technology

However, in the ultraviolet detector whose electrode is a planar interdigitated structure, since the positive and negative interdigitated electrodes need to meet certain width conditions, the interdigitated electrodes almost occupy the entire upper surface of the diamond, making the irradiated surface of the diamond positively less, which affects the number of carriers generated. Further, the electric field of the planar interdigitated structure is mainly distributed within a few microns below the diamond surface, which cannot effectively collect the carriers generated far away from the upper surface of the diamond, thus affecting The sensitivity and responsivity of the detector; in addition, one electrode of the ultraviolet detector with a sandwich sandwich structure is on the back, which reduces the light blocking of the front electrode, but because the overall thickness is thick, it is not good for the drift and collection of carriers, which also affects the detection device performance

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