Radiation heating immersion unit cleaning and drying device and drying method thereof

A radiant heating and drying device technology, applied in heating to dry solid materials, drying, dryers, etc., can solve problems such as failure of the function of the dried device, overheating damage to the immersion unit, pollution particles, etc., to avoid acceleration Effects of aging or contamination, improved stability, avoidance of deformation and functional failure

Active Publication Date: 2021-04-30
ZHEJIANG CHEER TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention solves the existing drying and drying treatment method or device for the immersion unit in the immersion lithography machine system, which easily causes local overheating damage to the immersion unit or introduces pollution particles, resulting in secondary pollution after the immersion unit is cleaned. A method provided by local overheating that causes functional failure of the dried device can effectively avoid the deformation and functional failure of some assembly parts caused by overheating of the immersion unit, avoid accelerated aging or pollution of the immersion unit, and improve the drying efficiency of the immersion unit. Clean, reliable and stable radiation heating immersion unit clean drying device and drying method thereof

Method used

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  • Radiation heating immersion unit cleaning and drying device and drying method thereof
  • Radiation heating immersion unit cleaning and drying device and drying method thereof
  • Radiation heating immersion unit cleaning and drying device and drying method thereof

Examples

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Embodiment 1

[0038] figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 , Image 6 In the shown embodiment, a radiation heating immersion unit cleaning and drying device includes a drying box 3 for drying the immersion unit. The top of the drying box 3 communicates with the outside world. The top of the drying box 3 is placed inside the box, and the top of the drying box 3 is placed with a quartz glass cover 2 for sealing the drying box 3. The quartz glass cover 2 has high light transmission and high cleaning effect, and can be more To a large extent, the drying treatment cleanliness of the immersion unit for drying treatment in the sealed drying box 3 and the infrared radiation drying penetration rate of the radiation heater 1 are guaranteed to improve the drying treatment efficiency; the quartz glass cover 2 can Improve the effectiveness of the radiant heater in heating and drying the immersion unit inside the drying box 3 through the sealing cover, and reduce the secondary poll...

Embodiment 2

[0041] figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 , Image 6 In the shown embodiment, a method for cleaning and drying a radiant heating immersion unit includes the following drying treatment method

[0042] A1. with the quartz glass cover described in embodiment 1, the upper end of the drying cabinet is sealed;

[0043] A2. In the sealed drying cabinet, pass into the drying cabinet through the air inlet described in embodiment 1. Stable dry gas, this dry gas has a temperature in a stable range value, makes and feeds the flow rate;

[0044] A3. Stable dry gas enters the upper cavity of the drying box along the air inlet, and the dry gas pushes the air in the upper cavity described in Example 1 to flow downward together, and from the The inter-chamber communication air outlet flows down into the lower cavity described in Embodiment 1 (see image 3 indicated by the arrow C in the middle);

[0045] A4. The stable dry gas pushes the air from the upper cavity a...

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Abstract

The invention discloses a radiation heating immersion unit cleaning and drying device and a drying method thereof. A radiation heater outside the upper part of a box body is used for heating and drying an immersion unit in a stable and dry gas environment in an upper cavity of a closed drying box body. A first air outlet, a second air outlet and a box bottom air outlet are matched with dry gas separation treatment of the upper cavity and a lower cavity, drying and heating treatment can be more stable and cleaner, and temperature and humidity data of the upper cavity and the lower cavity are collected through a temperature sensor and a humidity sensor correspondingly. Starting work and stopping work of the radiation heater can be controlled more reliably and effectively, deformation and functional failure of part of assembly parts caused by overheating of the immersion unit can be effectively avoided, accelerated aging or pollution brought by the immersion unit is avoided, and the reliability and stability of drying and cleaning of the immersion unit are improved.

Description

technical field [0001] The invention relates to an immersion lithography machine, in particular to an ultra-clean drying device for a radiation heating immersion unit on the immersion lithography machine and a drying method thereof. Background technique [0002] In the immersion lithography machine system, the immersion unit in the immersion head module is immersed in the pure water liquid for exposure for a long time due to objective needs during operation. In order to ensure that the immersion unit does not produce any pollutants or Pollution particles affect the exposure quality. Before putting into use, the immersion unit needs to be thoroughly cleaned to remove the pollutants generated in the manufacturing process; and the immersion unit needs to be replaced or cleaned regularly during use to ensure the immersion lithography machine can work stably for a long time. The immersion unit after cleaning needs to be dried and dried to remove the cleaning liquid remaining on t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F26B9/06F26B3/28F26B21/00F26B21/14F26B25/00F26B25/10
CPCF26B9/06F26B3/28F26B21/004F26B21/14F26B25/00F26B25/10F26B25/003
Inventor 江利民徐晓峰李元江深付新
Owner ZHEJIANG CHEER TECH CO LTD
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