Design and manufacturing method of high-power ultraviolet LED chip with vertical structure

Abstract

The invention belongs to the technical field of semiconductor electronic information, and particularly relates to a design and manufacturing method of a high-power ultraviolet LED chip with a vertical structure. The design of the high-power ultraviolet LED chip with the vertical structure is as follows: a sapphire substrate is used as a growth substrate, heteroepitaxial growth is carried out, the whole epitaxial process is completed by using an MOCVD technology, the sapphire substrate is an imaging substrate, namely a PSS substrate, the substrate is specially designed and is of a triangular pyramid structure with the vertex angle of 120 DEG, the light emitting efficiency can be greatly improved, and special surface nano-imprinting and double-layer imaging micro-nano processing greatly improve the radiation power and the light emitting efficiency of the ultraviolet light LED , and improve the current diffusion efficiency and the heat dissipation capability of the chip, so that the manufacturing size of the chip can be increased, the reliability of the purple light LED device is effectively improved, and the method can be suitable for industrial-grade application on a large scale.

Description

technical field [0001] The invention relates to the technical field of semiconductor electronic information, in particular to a method for designing and manufacturing a high-power vertical structure ultraviolet LED chip. Background technique [0002] With the advancement of science and technology and the development of new energy sources, solid-state LED lighting will become the trend of lighting in the future world. Due to the advantages of energy saving, environmental protection, safety, long life, low consumption, and low heat, LEDs have been widely used in traffic lights, Traffic lights, landscape decorative lights, display screens, car tail lights, mobile phone backlights, sterilization and other fields. At present, the LEDs on the market are mainly blue-green light, followed by red and yellow light. There are relatively few LED products of purple light and deep ultraviolet light, mainly due to the difficulty in manufacturing high-power deep ultraviolet LEDs and low lum...

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Problems solved by technology

[0004] The object of the present invention is to provide a design and manufacturing method of a high-power vertical structure ultraviolet LED chip, to solve the problem of low luminous efficiency, small size, high preparation cost and difficulty of the existing ultraviolet LED chip proposed in the above-mentioned background technology. The efficiency is low, the heat dissipation performance is poor, and it is difficult to adapt to the problem of high-power and convenient application in the industry

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