Method for cleaning gas spray header

Abstract

The invention discloses a method for cleaning a gas spray header deposited with sediments. The sediments comprise at least one element of gallium (Ga), magnesium (Mg), aluminum (Al) or indium (In). The cleaning method comprises the following steps of placing the gas spray header in a sodium hydroxide alkaline solution for cleaning; placing the gas spray header in an acidic mixed solution of nitric acid and hydrofluoric acid for cleaning; placing the gas spray header in a nitric acid solution for cleaning; and performing deionized water cleaning before or after the step of alkaline solution cleaning, acidic mixed solution cleaning or acidic solution cleaning. The sediments on the gas spray header which is cleaned by the alkaline solution, the acidic mixed solution and the acidic solution are effectively removed, so that the gas spray header is reused.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a cleaning method for removing deposits or grease generated on a gas shower head. Background technique [0002] In recent years, in the field of semiconductor manufacturing, gas shower heads for supplying gas to substrates such as semiconductor substrates have been used. For example, in metal organic compound chemical vapor deposition (MOCVD) or chemical vapor deposition (CVD), a mounting table for mounting a substrate is provided in the processing chamber, and a gas shower head is provided at a position opposite to the mounting table. [0003] After the gas shower head has been used for a period of time, some deposits will be deposited on it. If these deposits are not treated, they will accumulate on the surface of the gas shower head and block the gas ejection holes on the surface of the gas shower head, affecting Use of gas sprinklers. Moreover, these deposits are ...

AI Technical Summary

Problems solved by technology

[0003] After the gas shower head has been used for a period of time, some deposits will be deposited on it. If these deposits are not treated, they will accumulate on the surface of the gas shower head and block the gas ejection holes on the surface of the gas shower head, affecting Use of gas sprinklers

Moreover, these deposits are also easy to fall on the substrate to be processed, affecting the performance of the substrate to be processed

In addition, due to factors such as long-term exposure of the gas shower head to the chamber environment and artificial cleaning from time to time, grease is often attached to the surface of the gas shower head. If the grease is not treated, it will also block the gas on the surface of the gas shower head. The spray hole affects the use of the gas shower head

All of the above problems will eventually lead to the scrapping of the gas shower head and reduce the substrate production efficiency

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