Three-dimensional pressure sensor based on 3D printing template method and preparation method of pressure sensor

Abstract

The invention relates to a three-dimensional pressure sensor based on a 3D printing template method and a preparation method of the pressure sensor. The pressure sensor comprises a flexible truss in a customizable shape, wherein the truss takes a prototype made from a soluble photosensitive resin photocured additive as a template, and a graphene / copper composite supporting rod of a hollow structure is obtained; two pairs of flexible substrates / multi-layer triboelectric composite materials are symmetrically arranged on a small-area outer surface of the composite supporting rod, and two pairs of sensing signals in the orthogonal direction are mutually independent and are used for outputting pressure components in an X direction and a Y direction; and a composite piezoresistive structure A is arranged on a large-area outer surface, senses signals in a piezoresistive mode and is used for monitoring a Z-direction pressure signal, capable of changing along with the shape, of the structure; The preparation method of the anisotropic pressure sensor based on the 3D printing template method is used for preparing the pressure sensor. The sensor is simple in manufacturing process, can be freely customized and rapidly manufactured, is low in cost, high in efficiency and sensitive in work, and can sense and recognize a three-dimensional pressure signal on the basis of coating perception.

Description

technical field [0001] The invention relates to the field of additive manufacturing technology and sensor technology, in particular to a three-dimensional pressure sensor based on a 3D printing template method and a preparation method thereof. Background technique [0002] With the rapid development of flexible electronics and the popularization of Internet of Things technology, it can be used to monitor human physiological indicators (such as heartbeat, pulse, exercise cycle, blood pressure, etc.) and labor production status (such as spindle beating, robot motion state perception, etc.) Signal wearable electronic devices are gradually applied to social life, and the information obtained is used for quantitative acquisition of human health status and detection of service-oriented mechanical status, quantifying the processing methods of related physical signals, and establishing a "human / machine" control system. The two-way information channel of the interface plays a vital r...

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Problems solved by technology

[0008] The monitoring object of the flexible pressure sensor mentioned above is often discrete pressure data, which lacks the signal feedback of the pressure direction and vector characteristics, does not match the vector pressure signal presented as a three-dimensional physical quantity in practice, and shows forced Due to the sensing characteristics of deformation, the contact surface is easily damaged under long-term work; at the same time, the shape and structure of the designed sensor are often limited in the manufacturing process. The methods of photolithography, imprinting, etching, and lamination adopted in the sandwich structure lead to the sensing of multi-dimensional pressure signals (size, direction) in the form of superposition of multiple single-dimensional pressure sensors, which is complicated in process and low in efficiency, and increases It increases the manufacturing cost, affects the use range and application field of the pressure sensor, and limits the measurement range and interactive results

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