A three-dimensional pressure sensor based on 3D printing template method and its preparation method

Abstract

A three-dimensional pressure sensor based on a 3D printing template method and its preparation method. The pressure sensor includes a flexible truss with a customizable shape. The truss is templated by a prototype made of a soluble photosensitive resin photocured additive to obtain a graphene / copper composite with a hollow structure. Struts; two pairs of flexible substrates / multilayer triboelectric composite materials are symmetrically arranged on the outer surface of the composite strut with a small area, and the sensing signals of the two pairs of orthogonal directions are independent of each other, and are used to output the magnitude of the pressure components in the X and Y directions; the area The larger outer surface is a composite piezoresistive structure A, which senses signals in a piezoresistive manner and is used to monitor the Z-direction pressure signal that the structure can change with shape; the preparation method of anisotropic pressure sensor based on the 3D printing template method is used to prepare The above-mentioned pressure sensor; the sensor provided by the present invention has a simple manufacturing process, can be freely customized and quickly manufactured, has low cost, high efficiency, and sensitive work, and can realize the sensing and identification of three-dimensional pressure signals on the basis of wrapping perception.

Description

technical field [0001] The invention relates to the field of additive manufacturing technology and sensor technology, in particular to a three-dimensional pressure sensor based on a 3D printing template method and a preparation method thereof. Background technique [0002] With the rapid development of flexible electronics and the popularization of Internet of Things technology, it can be used to monitor human physiological indicators (such as heartbeat, pulse, exercise cycle, blood pressure, etc.) and labor production status (such as spindle beating, robot motion state perception, etc.) Signal wearable electronic devices are gradually applied to social life, and the information obtained is used for quantitative acquisition of human health status and detection of service-oriented mechanical status, quantifying the processing methods of related physical signals, and establishing a "human / machine" control system. The two-way information channel of the interface plays a vital r...

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Problems solved by technology

[0008] The monitoring object of the flexible pressure sensor mentioned above is often discrete pressure data, which lacks the signal feedback of the pressure direction and vector characteristics, does not match the vector pressure signal presented as a three-dimensional physical quantity in practice, and shows forced Due to the sensing characteristics of deformation, the contact surface is easily damaged under long-term work; at the same time, the shape and structure of the designed sensor are often limited in the manufacturing process. The methods of photolithography, imprinting, etching, and lamination adopted in the sandwich structure lead to the sensing of multi-dimensional pressure signals (size, direction) in the form of superposition of multiple single-dimensional pressure sensors, which is complicated in process and low in efficiency, and increases It increases the manufacturing cost, affects the use range and application field of the pressure sensor, and limits the measurement range and interactive results

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