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A floating gate control type near-infrared band bidirectional memory photoelectric memory and preparation method thereof

A two-way memory, near-infrared light technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problem of difficult to realize the positive and negative response transition of near-infrared band two-way memory storage optical erasing

Active Publication Date: 2022-07-12
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention mainly provides a floating-gate-controlled near-infrared band two-way memory photoelectric memory and its preparation method, which can solve the problem of the existing floating-gate-controlled photoelectric memory's properties of the light-absorbing material, floating gate and conductive channel material in the optical memory band Limitation, can only realize the optical memory in the visible light band, and can only realize the one-way injection of positive electric injection or reverse electric injection, and it is difficult to realize the storage of two-way memory in the near-infrared band and the positive and negative response transition of optical erasing

Method used

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  • A floating gate control type near-infrared band bidirectional memory photoelectric memory and preparation method thereof
  • A floating gate control type near-infrared band bidirectional memory photoelectric memory and preparation method thereof
  • A floating gate control type near-infrared band bidirectional memory photoelectric memory and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0030] like figure 1 As shown, a floating gate control type near-infrared band bidirectional memory photoelectric memory is provided. The photoelectric memory includes a substrate layer 1, a floating gate layer 2, a dielectric layer 3, a conductive channel layer 4 and a metal electrode arranged in sequence from bottom to top, and the material of the floating gate layer 2 is fullerene, which is used to store current The conductive channel layer 4 absorbs near-infrared light and provides a conductive channel; the dielectric layer 3 is a large band gap insulating material, and a potential barrier is formed between the dielectric layer 3 and the floating gate layer 2, so A potential barrier is formed between the dielectric layer 3 and the conductive channel layer 4 .

[0031] The working principle of the present invention: the material of the floating gate layer 2 is fullerene, which can effectively store electrons or holes injected from the conductive channel layer to the floati...

Embodiment 2

[0039] The present invention also provides a method for preparing a floating gate control type near-infrared band bidirectional memory photoelectric memory, the method comprising the following contents:

[0040] S1, prepare the substrate layer 1, clean the substrate layer 1 and dry it;

[0041] S2, on the substrate layer 1 after cleaning and drying, a layer of fullerene film is evaporated as the floating gate layer 2;

[0042] S3, preparing a layer of insulating material with a large band gap on the floating gate layer 2 as the dielectric layer 3;

[0043] S4. A conductive channel layer 4 is prepared on the dielectric layer 3, and a metal electrode is evaporated on the conductive channel layer 4 to complete the device preparation.

[0044] Further, an oxygen-silicon film is selected for the substrate layer 1, and cleaning the substrate layer 1 in S1 includes: sequentially using a detergent, acetone, ethanol, and deionized water to ultrasonically clean the oxygen-silicon film....

Embodiment 3

[0048] On the basis of Example 1, when the gate voltage and the positive and negative values ​​of the injection gate voltage are changed, different photoresponse sizes will be produced.

[0049] like Figure 5 As shown, different injected gate voltages cause different photoresponses. When the absolute magnitude of the gate voltage increases, the magnitude of the response will also increase. This is because the larger the gate voltage, the more carriers are injected, and the resulting current changes are also reduced. When the gate voltage is changed, the direction of the photoresponse also changes, which is due to the change of the electrical properties of the injected carriers, resulting in an opposite photoresponse.

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Abstract

The invention belongs to the field of optoelectronic memory, and specifically discloses a floating gate control type near-infrared band bidirectional memory optoelectronic memory and a preparation method thereof. A channel layer and a metal electrode, the floating gate layer material is fullerene, used to store carriers; the conductive channel layer absorbs near-infrared light and provides a conductive channel; the dielectric layer is a large band gap insulating material A potential barrier is formed between the dielectric layer and the floating gate layer, and a potential barrier is formed between the dielectric layer (3) and the conductive channel layer (4). When a positive voltage is applied between the substrate layer (1) and the source electrode (5), electrons are injected into the floating gate layer (2); between the substrate layer (1) and the source electrode When a negative voltage is applied between (5), holes are injected into the floating gate layer (2), thereby realizing the storage effect of a two-way memory modulated in the near-infrared band.

Description

technical field [0001] The invention relates to the field of photoelectric memory, in particular to a floating gate control type near-infrared band bidirectional memory photoelectric memory and a preparation method thereof. Background technique [0002] The fullerene molecule is composed of 60 carbon atoms, and its structure resembles a football, so it is also called football ene. From its structure, it can be seen that it is a stable molecule bound by carbon atoms. Fullerenes are destined to attract attention and interest as soon as the stable structure of carbon atoms is formed. Fullerenes are ideal electron acceptors due to their structural lack of electron alkenes, and undoped fullerenes are weak n-type semiconductors. Due to the excellent electron affinity of the fullerene molecule, it has the ability to store electrons, so it is possible to be used as a floating gate layer material in a floating gate controlled optoelectronic memory. Graphene is a single-atom layered...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/788H01L21/336
CPCH01L29/788H01L29/66825Y02P70/50
Inventor 王军韩兴伟韩超韩嘉悦刘澍锴范书铭李浩杰
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA