Three-layer circular inner and outer double resonant cavity broadband terahertz wave metasurface absorber
A double resonant cavity and surface absorption technology, which is applied in the field of absorbers, can solve the problems of narrow working frequency band, difficult processing, and low absorption rate, and achieve the effects of ultra-broadband absorption and easy, simple structure, and small size
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[0017] Three-layer circular inner and outer double resonant cavity broadband terahertz wave metasurface absorber:
[0018] In this embodiment, the structure based on the terahertz absorber and the shape of each component are as described above, so details are not repeated here. However, the specific parameters of each component are as follows: the metal copper layer is located at the bottom layer, covered with a thin layer of silicon, and the top layer is a three-layer dielectric metal structure. The ground layer is metallic copper, the unit size is 300×300 μm, and the thickness t=18 μm. The substrate adopts a silicon layer with high purity, 300×300 μm, and the thickness a=3 μm. The dielectric material is the most commonly used polyimide material, the dielectric constant ε r =3.5, thickness h=8μm. Taking the lowest layer of geometric metal as a reference, the surface size of the middle layer and the lower layer are scaled by 0.8 times and 0.6 times respectively, and the thi...
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