Temperature sensor based on doped transition metal nitride and preparation method of temperature sensor

Abstract

The invention provides a temperature sensor based on doped transition metal nitride and a preparation method of the temperature sensor. The method comprises the steps that cation vacancies are introduced into a transition metal nitride film to form a doped transition metal nitride film in the preparation process of the transition metal nitride film or after the transition metal nitride film is prepared; the crystal structure of the doped transition metal nitride film is subjected to phase change by regulating and controlling the concentration of the cation vacancies, so that the ideal doped transition metal nitride film is obtained; and the target temperature sensor is prepared by adopting the doped transition metal nitride film through an MEMS processing technology. According to the preparation method of the temperature sensor based on the doped transition metal nitride, the structure and the resistance of the temperature sensitive film are regulated and controlled by regulating and controlling the vacancy concentration, finally the temperature area and the sensitivity of the temperature sensor are adjustable, and the method has guiding significance in the development of resistance-type doped transition metal nitride film temperature sensors suitable for different target temperature areas.

Description

technical field [0001] The present invention relates to the technical field of transition metal nitride thin film temperature sensors, in particular, to a temperature sensor based on doped transition metal nitride and its preparation method, mainly based on a new theoretical mechanism-vacancy control mechanism to regulate the temperature of transition metal nitride thin films sensor performance. Background technique [0002] Temperature monitoring is extremely important in aerospace, national defense technology, medical treatment, biomedicine, and daily life. Therefore, researchers have been working on the improvement of temperature sensing technology, mainly including improving the temperature range, sensitivity and test accuracy of temperature sensing. At present, temperature sensors are mainly divided into resistive temperature sensors, PN junction temperature sensors, thermocouple temperature sensors and optical temperature sensors. [0003] The resistance temperature ...

AI Technical Summary

Problems solved by technology

However, the temperature sensitive range of the transition metal nitride thin-film resistance temperature sensor that has been developed so far is in the low temperature range (below 50K), and it is difficult to control the temperature range and sensitivity, and it is difficult to develop a sensor with an ideal temperature range and sensitivity. Temperature Sensor

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