A thermal peel-assisted integration process for extensible flexible neural electrode interfaces
A thermal stripping and flexible technology, applied in the field of biomedical engineering, can solve the problems of insufficient reliability and time-consuming electrode interface integration, and achieve the effect of simple operation, high reliability, and long-term recording or stimulation
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Embodiment 1
[0046] This embodiment provides a thermal peel-assisted extensible flexible neural electrode interface integration process, such as figure 1 As shown, the integration process is divided into eight steps:
[0047] (a) Using water-soluble adhesive tape (ASWT-2, Aquasol, Australia), the released polyimide substrate serpentine structure electrode was evenly adhered from the silicon wafer;
[0048] (b) Cut out a thermal peel tape (Revalpha, Nitto Denko, Japan) with a length and width slightly larger than the rectangular pad area of the polyimide substrate serpentine structure electrode, and attach it to the polyimide substrate serpentine structure in parallel alignment On the back of the electrode pad area, make sure that the thermal peel tape completely covers the area below the electrode pad, and at the same time, there is a certain distance from the edge of the polyimide rectangular pad near the serpentine wire, that is, exposing one of the rectangular pads near the serpentine...
Embodiment 2
[0060] In this embodiment, the silicone rubber adhesive is no longer used, but after the polyimide substrate serpentine structure electrode is prepared, water-soluble tape is used to stick it from the surface of the silicon wafer, and then the backside is exposed and sputtered. A layer of titanium and silicon dioxide, 10 nanometers and 50 nanometers thick, respectively, followed by a rectangular thermal release tape. Before transferring to the elastic silica gel substrate, UV ultraviolet light is used to irradiate the elastic silica gel substrate, so that the back surface of the serpentine structure electrode sputtered with titanium and silicon dioxide is in contact with the surface of the elastic silica gel substrate, and under a certain pressure, It was placed in an oven for 10 minutes to generate a strong chemical bond through a condensation reaction, and then the water-soluble tape was dissolved in hot water to achieve reliable bonding between the polyimide substrate serpen...
Embodiment 3
[0063] In this embodiment, according to the differences in the physical structure and mechanical properties of the implanted target tissue, elastic silicone substrates with different thicknesses and Young's modulus can be selected. Changes in the physical structure and properties of the material will not affect the thermocompression bonding effect.
[0064] In addition, the polymer substrate serpentine structure electrode substrate material can be replaced with a better biocompatible Parylene film, which can withstand the ACF hot pressing temperature and has the same properties as polyimide. Mechanical strength, high optical transparency and excellent biocompatibility (FDA Class VI), suitable for integration with elastic PDMS substrates that are also biocompatible, providing an effective guarantee for long-term implantation of extensible flexible neural electrodes .
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