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Single crystal furnace auxiliary magnetic field control system and method

A technology of auxiliary magnetic field and control system, applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems of deviation between the magnetic field center and the crystal interface, reducing the magnetic field effect, and poor single crystal quality, etc. The effect of improving crystal quality, improving efficiency and quality

Inactive Publication Date: 2021-07-16
上海磐盟电子材料有限公司
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  • Application Information

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Problems solved by technology

[0004] In view of the above-mentioned related technologies, the inventor believes that during the crystal pulling process, the center of the magnetic field will not change, but the interface of the crystal will gradually change, thereby causing the center of the magnetic field to shift from the interface of the crystal, reducing the effect of the magnetic field, resulting in a single Poor crystal quality

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  • Single crystal furnace auxiliary magnetic field control system and method
  • Single crystal furnace auxiliary magnetic field control system and method
  • Single crystal furnace auxiliary magnetic field control system and method

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Embodiment Construction

[0036] The following is attached Figure 1-3 The application is described in further detail.

[0037] The embodiment of the present application discloses a single crystal furnace auxiliary magnetic field control system.

[0038] refer to figure 1 with figure 2 The single crystal furnace auxiliary magnetic field control system includes two magnetic heads 1 arranged opposite to each other. The two magnetic heads 1 are located on both sides of the furnace drum 2 of the single crystal furnace. Below the magnetic head 1 is provided with a drive mechanism that drives the two magnetic heads 1 to move, the drive mechanism includes a first drive assembly 3 and a second drive assembly 4, the first drive assembly 3 drives the two magnetic heads 1 to move horizontally, and the second drive assembly 4 Drive the two components to move up and down.

[0039] The first driving assembly 3 includes guide rails 31 arranged on both sides of the furnace drum 2 , all located directly below the ...

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Abstract

The invention relates to a single crystal furnace auxiliary magnetic field control system and method, which belongs to the field of single crystal manufacturing. The system comprises a furnace barrel, magnetic heads are arranged on two sides of the furnace barrel and are oppositely arranged; a driving mechanism is arranged below the magnetic heads and comprises a first driving assembly for driving the two magnetic heads to move toward each other in opposite directions, and a second driving assembly used for driving the magnetic heads to move up and down. The system has the effect of improving the magnetic field, thereby improving the quality of the produced single crystal.

Description

technical field [0001] The present application relates to the field of single crystal manufacturing, in particular to a single crystal furnace auxiliary magnetic field control system and method. Background technique [0002] The single crystal furnace is a kind of equipment that melts polycrystalline materials such as polycrystalline silicon with a graphite heater in an inert gas environment, and grows a dislocation-free single crystal by the Czochralski method. The method to improve the impurity distribution of Czochralski single crystal and the material properties related to the impurity is to introduce an external magnetic field to the melt during crystal pulling. Because for the conductive substance in the molten state, the convection under the condition of the magnetic field will inevitably cause the existence of the induced current, and the magnetic field has a Lorentz force on the induced current, so the convection in the melt can be suppressed, and the suppression of...

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Application Information

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IPC IPC(8): C30B30/04C30B15/26
CPCC30B30/04C30B15/26
Inventor 范桂林李茂欣沈伟华
Owner 上海磐盟电子材料有限公司