Test method for coordination effect of displacement damage and total ionization dose of bipolar process electronic device
An electronic device and bipolar process technology, applied in the field of bipolar process electronic device displacement damage and ionization total dose synergy effect test, can solve the problem of MOS device displacement damage and ionization total dose synergy effect, displacement damage sensitivity, threatening electronic system reliability and other issues, to achieve the effect of saving test costs and time costs
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[0042] Reactor neutrons and 60 The γ-rays from the Co source are representative radiation environments for studying the effect of displacement damage and the effect of total ionizing dose, respectively. The neutron radiation environment mainly produces displacement damage, 60 Co isotope gamma radiation sources are mainly used to produce the total dose effect of ionizing radiation.
[0043] Neutron radiation will cause the displacement effect of lattice atoms in semiconductor materials, form defects and defect groups, and introduce a large number of defect energy levels in the forbidden band of semiconductor materials. These deep-level defects increase the carrier recombination centers, thereby causing a decrease in the minority carrier lifetime of electronic devices in bipolar processes, resulting in severe degradation of electrical performance, while neutron-induced ionizing radiation damage is negligible. The main mechanism of the total dose effect of ionizing radiation on el...
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