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Material treatment equipment for power field effect transistor processing

A power field effect tube and material processing technology, applied in the direction of inorganic chemistry, non-metallic elements, silicon compounds, etc., can solve the problems that fuel cannot be burned repeatedly, affects the processing effect of equipment, and reduces the processing temperature of equipment, so as to improve the utilization rate , increase temperature, reduce waste

Inactive Publication Date: 2021-08-13
广东力宏微电子有限公司
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a material processing equipment for processing power field effect tubes, to solve the above-mentioned background technology that the fuel heated by the material processing equipment cannot be repeatedly burned when heating the equipment, resulting in waste of raw materials, while fuel Incomplete combustion will also lead to a decrease in the processing temperature of the equipment, which will affect the processing effect of the equipment

Method used

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  • Material treatment equipment for power field effect transistor processing
  • Material treatment equipment for power field effect transistor processing
  • Material treatment equipment for power field effect transistor processing

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Embodiment Construction

[0028] Such as Figure 1 to Figure 5 As shown, the present invention provides a technical solution: a material processing equipment for power field effect tube processing, including a box assembly 1 and a heating assembly 2, the outside of the box assembly 1 is wrapped with a heating assembly 2, and the heating assembly 2 includes a heating Casing 201, oxygen adding pipe 202, fire spray pipe 203 and exhaust pipe 204, and the lower end of heating box 201 is connected with oxygen adding pipe 202, and the inside of heating box 201 is equipped with fire spray pipe 203, and the heating box The upper end of 201 is connected with an exhaust pipe 204, and four fire pipes 203 are equidistantly installed inside the heating box 201;

[0029] The specific operation is as follows, the oxygen supply pipe 202 is evenly connected with four at the lower end of the heating box body 201, and a large amount of oxygen can be passed into the inside of the heating box body 201 through the oxygen sup...

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Abstract

The invention relates to material treatment equipment for power field effect transistor processing, which comprises a box body assembly and a heating assembly. The box body assembly is wrapped with the heating assembly. The heating assembly comprises a heating box body, an oxygen adding pipe, fire spraying pipes and an exhaust pipe. The lower end of the heating box body is connected with the oxygen adding pipe. The fire spraying pipes are installed in the heating box body, and the four fire spraying pipes are installed in the heating box body at equal intervals. The material treatment equipment for power field effect transistor processing has the beneficial effects that fuel can be fully combusted, the utilization rate of the fuel can be improved, the temperature of the equipment can be conveniently increased, meanwhile, the equipment can tightly seal a processing part and prevent external air from entering the processing part to cause waste of coke, the equipment can extract carbon monoxide generated by reaction for utilization, the equipment can separate coke from crude silicon, and the equipment can make the crude silicon contact an acid solution more fully to accelerate the purification of silicon.

Description

technical field [0001] The invention relates to the technical field of power field effect tube processing, in particular to a material processing equipment for power field effect tube processing. Background technique [0002] Power MOS field effect transistor, that is, MOSFET, its original meaning is: MOS (MetalOxideSemiconductor metal oxide semiconductor), FET (FieldEffect Transistor field effect transistor), that is, the gate of the metal layer (M) is separated by the oxide layer (O) to use the electric field The effect to control the semiconductor (S) field effect transistor, the power field effect transistor needs to use silicon as a raw material in the processing process, and silicon needs to be purified by processing equipment before it can be used, so the material processing equipment is a power field effect transistor. It is an indispensable equipment in the process of pipe processing. [0003] Existing material processing equipment cannot burn the fuel repeatedly w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037
CPCC01B33/037
Inventor 钟惠生
Owner 广东力宏微电子有限公司
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