Micro ultraviolet light-emitting diode chip for ultraviolet communication

Abstract

The invention relates to a Micro ultraviolet light emitting diode chip for ultraviolet communication. The diode chip sequentially comprises a substrate, a buffer layer and an n-type electron injection layer in the epitaxial growth direction, the n-type electron injection layer is of a two-stage step structure, and the second-stage step sequentially comprises a multi-quantum well layer, a p-type electron blocking layer and a first p-type hole injection layer in the epitaxial growth direction; the first p-type hole injection layer is of another two-stage step structure, and a p-type hole acceleration layer, a second p-type hole injection layer, a p-type heavily doped hole injection layer and a current expansion layer are sequentially arranged on a second stage step of the first p-type hole injection layer along the epitaxial growth direction; the current expansion layer is provided with a p-type ohmic electrode, and the exposed part of the n-type electron injection layer is provided with an n-type ohmic electrode. The light efficiency and the response speed of the device are improved, and the requirement of high-speed data transmission is met.

Description

technical field [0001] The invention relates to the technical field of Micro LED lighting, and in particular relates to a Micro ultraviolet light-emitting diode chip for ultraviolet communication and a preparation method thereof. Background technique [0002] Compared with traditional light sources, light-emitting diodes have the advantages of low energy consumption, small size, long service life, wide display color gamut, and environmental protection. At present, it is widely used in lighting, display, medicine, military, biochemical detection and other fields. With the gradual shrinking of the size of LED devices, Micro LED, as a new generation of display technology, is receiving extensive attention and research. Compared with LCD (liquid crystal display) and OLED (organic light-emitting diode) technologies currently used in the display field, Micro LED has the advantages of high photoelectric conversion efficiency, lower energy consumption, and fast response speed, and M...

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Problems solved by technology

Micro LED devices can effectively improve the current spreading effect, reduce the junction temperature and increase the light extraction rate; although the advantages are significant, one of the main problems that needs to be solved urgently is the Shockley caused by sidewall defects in smaller-sized Micro LED devices. - Read-Hall (SRH) non-radiative recombination can have a severe impact on the optical power and external quantum efficiency (EQE) of the device

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