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Bismuth electroplating solution and method for preparing bismuth film through electroplating

An electroplating solution and thin film technology, applied in circuits, semiconductor devices, etc., can solve problems such as strong cyanide toxicity, and achieve the effects of strong electrical conductivity, good binding force, high dispersion and covering ability

Pending Publication Date: 2021-09-17
NAT INST OF METROLOGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The electroplating solution is divided into cyanide-containing plating solution and cyanide-free plating solution. Among them, the cyanide-containing plating solution is stable and reliable, has high current efficiency, good dispersion ability and covering ability, and the obtained plating layer is crystallized fine and bright, and is widely used by countries all over the world; but Due to the strong toxicity of cyanide, there are many problems in the working environment and waste liquid treatment. Especially with the improvement of people's environmental awareness, the low-toxicity cyanide-free electroplating technology is gradually getting great attention from all over the world, so the cyanide-free plating solution system It is imperative to promote the research

Method used

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  • Bismuth electroplating solution and method for preparing bismuth film through electroplating

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Embodiment Construction

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0019] In present embodiment example 1, use above-mentioned electroplating solution to plate bismuth thin film to comprise the following steps

[0020] Preparation of electroplating solution; preparation of bismuth plating electroplating solution includes the following reagent components: potassium hydroxide or potassium nitrate or potassium chloride 0.5mol / L, nitric acid 2.0mol / L, glycerin 1.5mol / L, L-tartaric acid 0.8mol / L, Bismuth nitrate pentahydrate is 0.3mol / L, and the rest is deionized water.

[0021] Plating preparation process

[0022] Prepare the cathode seed layer: after depositing 5nm Ti on the silicon wafer, continue to deposit 80nm Au to prepare the el...

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Abstract

The invention discloses bismuth electroplating liquid and a preparation method for preparing a bismuth film through electroplating. The bismuth electroplating liquid comprises 0.5-2.0 mol / L of conducting salt, 0.5-3.0 mol / L of nitric acid, 0.50-3.0 mol / L of glycerinum, 0.20-1.0 mol / L of complexing agent and 0.05-0.50 mol / L of bismuth nitrate pentahydrate. According to the bismuth electroplating liquid and the preparation method for preparing the bismuth film through electroplating, a cyanide-free plating solution is adopted for preparation, the performance is stable, green and environment-protecting effects are achieved, the electroplating technology is easy to operate, a bismuth-plated film can be controlled by regulating and controlling pulse parameters and plating solution components and concentration, and the bismuth film with the characteristics of being smooth and bright in surface, low in porosity, good in binding force, easy to control the thickness and the like is prepared.

Description

technical field [0001] The invention belongs to the technical field of electroplating, and in particular relates to a bismuth electroplating solution and a method for preparing a bismuth thin film by electroplating. Background technique [0002] Bismuth is an orthorhombic metal in the transition state, which has both covalent bonds and metal bonds. This structure makes it have a series of special physical and chemical properties, and is widely used in semiconductors, superconducting materials, electroplating, batteries and many other fields. At room temperature, bismuth has oxidation resistance under both dry and wet conditions, and has good resistance to X-rays, high sensitivity and conductivity to heat, so it is often used as a material for preparing X-ray TES absorbers. In recent years, with the development of bismuth industry and people's emphasis on environmental protection, the trend of green, environmental protection and lead-free will provide a good development pros...

Claims

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Application Information

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IPC IPC(8): C25D3/54C25D7/12
CPCC25D3/54C25D7/123
Inventor 陈建王雪深李劲劲徐骁龙
Owner NAT INST OF METROLOGY CHINA
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