Gas chromatography system and method for detecting impurity content in high-purity germanium tetrafluoride

Abstract

The invention belongs to the technical field of high-purity germanium tetrafluoride product quality detection, and particularly discloses a gas chromatography system and method for detecting the impurity content in high-purity germanium tetrafluoride. The gas chromatography system comprises switching valve systems, a carrier gas system, a sample introduction system, a column system, a tail gas treatment system and a detection system which are mutually connected through pipelines. The number of the switching valve systems is five. The number of the carrier gas systems is six. Two quantitative loops for containing samples in a sample injection system are communicated, sample injection of the two quantitative loops can be completed at the same time, two sets of separation systems are arranged, namely different components of high-purity germanium tetrafluoride are separated by using different pre-columns and chromatographic columns, and impurity gases enter corresponding detection systems for detection after main components are separated. The main component germanium tetrafluoride is discharged from each tail gas treatment port in a reverse blowing manner, and the main component germanium tetrafluoride is blown out by utilizing double reverse blowing and central cutting by controlling the reverse blowing time after sample introduction by using the gas chromatography system disclosed by the invention, so that the detection limit of trace impurity analysis and the accuracy of a result are improved.

Description

Technical field [0001] The present invention is in the detection of high-purity germanium tetrafluoride, and in particular relates to systems and methods for gas chromatographic germanium tetrafluoride impurity content detecting a high purity. Background technique [0002] Germanium tetrafluoride (GeF 4 ) Is a germanium fluoride, it has special chemical properties: colorless gas at normal temperature and pressure, contact with air, the water vapor will be the reaction of air with vigorous fuming. Hydrolysis occurs in the water, generating GeO 2 Ho 2 GEF 6 ; 3GeF 4 + 2h 2 O → GeO 2 + 2h 2 GEF 6 . Completely dried germanium tetrafluoride gas does not attack glass, but can corrode and grease mercury, germanium tetrafluoride, thus detecting instrument most demanding requirements, a specific part of the corrosion resistance. Germanium tetrafluoride gas to the eyes, skin, lungs and upper respiratory tract has a stimulating effect and can not leak into the air. [0003] 72 and 76 isotop...

AI Technical Summary

Problems solved by technology

During the detection of germanium tetrafluoride gas, because germanium tetrafluoride will corrode the detector, the main component germanium tetrafluoride cannot enter the detector

Electronic grade germanium tetrafluoride has such important applications, but due to its special chemical properties and ultra-high purity requirements, there is currently no detection method for the gas impurity content in electronic grade germanium tetrafluoride

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