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Flexible miniature supercapacitor and manufacturing method thereof

A technology of supercapacitors and manufacturing methods, which is applied in the manufacture of hybrid/electric double-layer capacitors, etc., can solve the problem that the process flow is not easy to integrate flexible and wearable substrates, affects interdigitated micro-flexible supercapacitors, and the environment has high environmental problems. requirements and other issues, to achieve the effect of improving electrochemical performance, good mechanical performance and high utilization rate

Active Publication Date: 2021-09-21
QINGDAO TECHNOLOGICAL UNIVERSITY
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although these conventional microfabrication methods have been successfully used in the fabrication of microdevices, their process flows are not easily integrated into specific flexible and wearable substrates, and most of them are only applicable to fabricate interdigitated electrodes with specific materials, The interdigital structure has a low aspect ratio; some manufacturing processes require expensive facilities, expensive chemicals, and clean rooms, which have high requirements on the environment, and the manufacturing process is complex, inefficient, and produces a lot of material waste and pollution gas
These existing technologies or solutions have deficiencies and limitations in terms of miniature, flexible, high-efficiency, low-cost, and batch manufacturing, which seriously affect and restrict the wider commercial application of interdigitated micro-flexible supercapacitors, and urgently need to be developed Novel fabrication methods and strategies for efficient, low-cost, and scalable fabrication of conductive polymer-based interdigitated micro-flexible supercapacitors

Method used

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  • Flexible miniature supercapacitor and manufacturing method thereof
  • Flexible miniature supercapacitor and manufacturing method thereof
  • Flexible miniature supercapacitor and manufacturing method thereof

Examples

Experimental program
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Embodiment 1

[0050] Using electric field-driven spray deposition micro-nano 3D printing technology and electrochemical polymerization process to manufacture micro-flexible supercapacitors, select PDMS as the micro-flexible substrate, select conductive silver paste 201s (a kind of flexible conductive silver paste) as the conductive substrate, and select PPy as the electrode material , the solid electrolyte is LiCl / PVA gel electrolyte, and the interdigital structure adopts linear interdigitation such as figure 2 shown. Its process is as figure 1 As shown, the specific preparation steps include:

[0051] (1) Fabrication of micro-flexible substrates

[0052] Ordinary glass was used as the substrate; the glass substrate was first cleaned, deionized water was ultrasonically treated for 10 min, and then dried with nitrogen. On the glass substrate, a layer of PDMS film was prepared by electric field-driven spray deposition micro-nano 3D printing technology, and an appropriate amount of Dow Cor...

Embodiment 2

[0063] Micro-nano 3D printing technology driven by electric field-driven spray deposition and electrochemical polymerization process are used to fabricate micro-flexible supercapacitors. Ecoflex is selected as the micro-flexible substrate, TPU and Ag mixture are used as conductive materials, PANI is selected as electrode material, and solid electrolyte is H 2 SO 4 / PVA gel electrolyte, the finger structure adopts curved fingers. Concrete preparation steps include:

[0064] (1) Fabrication of micro-flexible substrates

[0065] Using silicon wafers as the substrate: firstly, the silicon wafer substrate is cleaned, deionized water is ultrasonically treated for 10 minutes, and then blown dry with nitrogen gas. On the glass substrate, a layer of Ecoflex film is prepared by using electric field-driven spray deposition micro-nano 3D printing technology. Choose Smooth-on, Ecofiex00-30 platinum-cured silica gel, A:B mass preparation ratio 1:1, its thickness is about 10 μm, and its ar...

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Abstract

The invention discloses a flexible miniature supercapacitor and a manufacturing method thereof. The manufacturing method comprises the following steps of: manufacturing a flexible substrate on a substrate; printing a female die by adopting an electric field driven spray deposition micro-nano 3D printing technology; depositing an electrode material on the female die through an electrochemical polymerization process; uniformly coating a solid electrolyte on the electrode material; and sealing, and preparing the flexible miniature supercapacitor. Low-cost batch manufacturing of the conductive polymer flexible micro supercapacitor is realized by combining the electric field driven spray deposition micro-nano 3D printing technology and the electrochemical polymerization technology.

Description

technical field [0001] The application belongs to the field of 3D printing and energy, and in particular relates to a flexible micro-supercapacitor and a manufacturing method thereof. Background technique [0002] In the rapid development of miniaturized, portable, and highly integrated flexible electronics, there is an increasing demand for miniature flexible power sources and energy storage units. It is widely used in many fields such as portable wireless communication systems, micro-electromechanical systems, biological wireless sensors, multi-functional micro / nano systems, micro-robots, and wearable / implantable medical devices. Microbatteries are the main choice for fabricating miniature power systems, however their disadvantages of low power density and short cycle life greatly limit their wide application in microelectronic devices, especially in implantable electronic medical devices. Therefore, new, miniaturized, and highly efficient energy storage devices are urgen...

Claims

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Application Information

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IPC IPC(8): H01G11/84H01G11/86
CPCH01G11/84H01G11/86Y02E60/13
Inventor 张广明李鹏飞韩永芹兰红波韩志峰石凯朱晓阳
Owner QINGDAO TECHNOLOGICAL UNIVERSITY
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