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Microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device and preparation method and application thereof

A technology of molybdenum oxide and hyperbolic sound, which is applied in the direction of scientific instruments, instruments, and material analysis through optical means, can solve the problems of increased repeatability, narrow enhanced wavelength band, and limited detection capabilities, achieving high incident light compression and improved efficiency effect

Active Publication Date: 2021-10-15
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, at present, this technology has the defects of very narrow enhanced band, greatly limited detection capability, and poor repeatability, and it does not have the universal significance of trace molecular detection.

Method used

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  • Microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device and preparation method and application thereof
  • Microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device and preparation method and application thereof
  • Microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device and preparation method and application thereof

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Experimental program
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Embodiment 1

[0064] This embodiment is used to illustrate the structure of the metal microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device of the present invention.

[0065] figure 1 It is a longitudinal cross-sectional front view of the device of the present invention having a molybdenum oxide film 103 and a molybdenum oxide film suspension structure composed of a silicon dioxide groove microcavity 105 .

[0066] A metal-molybdenum oxide acoustic hyperbolic phonon polariton device for enhancing infrared spectrum detection without a metal layer is provided with a suspended molybdenum oxide thin layer, including a first substrate 101, a second The substrate 102, the groove microcavity 105, the molybdenum oxide thin film 103, the substance to be detected 106, the incident infrared light 107, and the s-SNOM tip 108, the substance to be detected 106 is placed in the groove microcavity 105. The thickness of the substance to be detected is 0.6nm-10nm.

[0067] Wherein, the m...

Embodiment 2

[0073] This embodiment is used to illustrate the structure of the metal microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device of the present invention.

[0074] figure 2 It is a longitudinal cross-sectional front view of the device of the present invention having a molybdenum oxide film 103 and a molybdenum oxide film suspended structure composed of a metal layer groove microcavity 105 .

[0075] Provide a metal-molybdenum oxide acoustic hyperbolic phonon polariton device with a molybdenum oxide thin film suspension structure composed of a molybdenum oxide thin film 103 and a metal groove microcavity 105 for enhanced infrared spectrum detection, including a first substrate 101. The second substrate 102, the metal layer 104, the groove microcavity 105, the molybdenum oxide film 103, the substance to be detected 106, the incident infrared light 107, and the s-SNOM tip 108, and the substance to be detected 106 is placed in the groove microcavity within 105. ...

Embodiment 3

[0081] This embodiment is used to illustrate the structure of the metal microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device of the present invention.

[0082] image 3 It is a structural schematic diagram of the molybdenum oxide film 103 and the metal groove microcavity 105 in the present invention. see image 3 , the molybdenum oxide thin film 103 is rectangular, the metal groove microcavity 105 is an array rectangular structure, and the groove microcavities are not in contact with each other.

[0083] figure 2 It is an enlarged longitudinal cross-sectional view of the structure of the thin film molybdenum oxide 103 and the metal groove microcavity 105 in the present invention. see figure 2 , the longitudinal section of the metal-molybdenum oxide stack is a microcavity structure, the metal layer groove is a microcavity shape, and the molybdenum oxide part covering the gold layer groove microcavity 105 is in a suspended state, forming a seal with the...

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Abstract

The invention provides a metal microcavity-molybdenum oxide acoustic hyperbolic phonon polariton device. The device comprises a substrate, a metal layer, a microcavity air layer, a to-be-detected substance and a molybdenum oxide film which are sequentially arranged from bottom to top, wherein the metal layer is deposited on the substrate, a groove microcavity structure with an array property is processed on the gold layer, the molybdenum oxide thin film covers the gold layer, and the molybdenum oxide thin film on the groove microcavity is in a suspended state. The invention also provides a preparation method and application of the device. Compared with other sensing device structures utilizing infrared spectrum to detect substances, the device can realize extremely strong light field constraint (mode volume VAPhPs / V0-10-11) and great electromagnetic field enhancement (about 109), improves the efficiency of infrared spectrum detection of micromolecules, and is one of the schemes for effectively solving the problem of single molecule infrared spectrum detection.

Description

technical field [0001] The invention relates to the technical field of molecular infrared detection, in particular to a microcavity-molybdenum oxide acoustic hyperbolic phonon polarimeter device and its preparation method and application. Background technique [0002] Infrared radiation contains rich objective information, and its detection has attracted much attention. Infrared detectors have covered short-wave, medium-wave and long-wave ranges, and have been widely used in military and civilian fields. Its detection principle is to use the photoelectric conversion performance of the material to convert the photon signal of infrared radiation into an electronic signal, and combine it with an external circuit to achieve the goal of detecting infrared light signals. [0003] Infrared spectroscopy is a technology and method that directly detects molecular vibration modes to realize characteristic identification and quantitative analysis of substances. This technology has the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/35G01N21/3563
CPCG01N21/35G01N21/3563
Inventor 戴庆郭相东杨晓霞吕蔚吴晨晨
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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