Acceleration signal conversion method, servo circuit and quartz flexible accelerometer

A signal conversion and servo circuit technology, which is applied in the direction of acceleration measurement using inertial force, can solve problems such as noise interference and response time reduction, and achieve the effects of reducing noise interference, improving output accuracy, and improving detection accuracy

Pending Publication Date: 2021-11-09
XIAN MICROELECTRONICS TECH INST
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Problems solved by technology

[0004] In order to solve the problems existing in the prior art, the present invention provides an acceleration signal conversion method, a servo circuit and a quartz flexible accelerometer to solve the problem that the current inertial measurement system needs t

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  • Acceleration signal conversion method, servo circuit and quartz flexible accelerometer
  • Acceleration signal conversion method, servo circuit and quartz flexible accelerometer

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0041] Such as figure 1As shown, the present invention provides a high-precision digital output type closed-loop control quartz flexible accelerometer servo circuit, which has a direct digital output function, wherein the circuit integrates differential capacitance detection, capacitance-voltage conversion, A / D Conversion (analog / digital conversion), digital logic control and D / A conversion (digital / analog conversion) functions, with high-precision acceleration signal digital conversion capability. Its output digital signal can be directly passed through SPI or I 2 C serial port reading, applied to the post-level computer, without subsequent current-frequency or analog / digital conversion module processing. Moreover, the servo circuit of the present invention also has a closed-loop control function. The circuit has a built-in 24-bit / analog con...

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Abstract

The invention discloses an acceleration signal conversion method, a servo circuit and a quartz flexible accelerometer, and the method comprises the following steps: receiving a differential capacitance signal of a quartz meter head, converting the differential capacitance signal into a voltage signal, and converting the voltage signal into a digital signal; collecting temperature field information in the accelerometer and converting the temperature field information into a digital signal; and performing high-order nonlinearity and temperature drift coefficient calibration compensation on the digital signal to obtain an acceleration digital signal, leading out the acceleration digital signal through a serial port, outputting the acceleration digital signal to the outside, completing acceleration signal conversion, converting the output digital signal into an analog signal, and connecting the analog signal to a feedback loop after amplification and compensation to form a closed-loop control system. The size of the inertial measurement system can be greatly reduced, the detection precision of the inertial measurement system is effectively improved, long-line transmission is avoided, noise interference is reduced, temperature information and voltage signals are converted into digital signals for calibration compensation, the output precision of the accelerometer can be greatly improved, and the zero-bias stability is improved.

Description

technical field [0001] The invention belongs to the field of accelerometers, in particular to an acceleration signal conversion method, a servo circuit and a quartz flexible accelerometer. Background technique [0002] As the core device of inertial navigation system, vibration detection and gravity field measurement, accelerometer plays a very important role in the fields of aerospace, military weaponry and industrial automatic control. Among them, the quartz flexible accelerometer is widely used in the fields of inertial navigation and guidance control due to its high resolution and high stability. The quartz flexible accelerometer adopts the principle of force balance to realize high-precision acceleration signal detection. This type of accelerometer is mainly composed of two parts: a quartz meter head and a servo control circuit. Among them, the servo control circuit is manufactured by hybrid integration process, and its output signal is an analog current signal propor...

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Application Information

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IPC IPC(8): G01P15/12
CPCG01P15/12
Inventor 万欢欢徐鑫杨浩阮晓明
Owner XIAN MICROELECTRONICS TECH INST
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