Vacuum pipeline leak detection device and method based on laser trace gas absorption spectrum
A technology of vacuum pipeline and absorption spectrum, which is applied in gas/liquid distribution and storage, pipeline system, color/spectral characteristic measurement, etc., to achieve the effect of improving detection efficiency, high detection sensitivity, and reducing detection cost
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[0060] The specific content of the present invention will be further explained in detail below in conjunction with the examples.
[0061] Such as Figure 1 to Figure 10 As shown, this embodiment provides a vacuum pipeline leak detection device based on laser trace gas absorption spectroscopy, including a plurality of detection units 6 arranged on the inner wall of the vacuum pipeline 1, and the detection units 6 include correspondingly arranged lasers and photodetectors 41; Detect the inside of the vacuum pipeline 1 in the corresponding area; the distance between the laser generator 31 and the photodetector 41 determines the length of the laser path, the shorter the path, the higher the position accuracy of the gas leak detection, which is convenient for subsequent leaks Or search for leaks, but the number of detection units 6 will be increased correspondingly, which will increase the equipment cost. During specific implementation, through cost optimization analysis, plan and...
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