Aspheric reflector coating method based on low-temperature plasma surface modification

Abstract

The invention discloses an aspherical reflector coating method based on low-temperature plasma surface modification, belongs to the technical field of coating processing, and aims to solve the problem that a film layer falls off due to the fact that a PMMA substrate is easy to absorb moisture in an existing coating process. The method comprises the following steps that a support system guarantees connection with a control computer; the control computer firstly controls a vacuum system to provide a vacuum environment for coating and then controls a main computer, the main computer controls the high-voltage power supply to enable an electron gun to emit electron beams, the speed of the electron beams is changed by changing the voltage of the high-voltage power supply, and the main computer controls an electron beam control unit; the electron beam control unit controls the movement directions of the electron beams by changing the voltage between polar plates, and the electron gun is located in a high vacuum chamber and generates the electron beams, and the electron beams enter the low vacuum chamber through an entrance window; the electron beams ionize reaction gas to generate plasma, or the reaction gas in the reaction chamber is excited through the radio frequency source to generate plasma cloud; and modifying is carried out on the surface of a PMMA sample.

Description

technical field [0001] The invention relates to a method for coating an aspheric mirror, belonging to the technical field of coating processing. Background technique [0002] At present, plastic materials are used for aspheric mirrors in panoramic lenses. Since plastic lenses can be processed by injection molding, compared with the traditional glass aspheric optical element processing method, aspheric optical elements need to prepare high reflection films. [0003] The metal reflective film is designed with metal. Common metal coating materials include Al, Ag, Au and Cu. Considering the excellent performance and economy of Al, Al is used as the coating material. However, when only a single-layer Al reflective film is prepared, its reflectance in the visible light range is only about 90%, which cannot meet the application requirements. Therefore, the reinforced aluminum reflective film should be designed to meet the requirements of high reflection. Enhanced aluminum reflect...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that the PMMA substrate of the existing coating process is easy to absorb moisture and cause the film layer to fall off, the present invention provides a coating method for aspheric mirrors based on low-temperature plasma surface modification

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