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Supporting and heat insulation integrated heat preservation cylinder and preparation method thereof

A heat preservation cylinder and cylinder body technology, applied in chemical instruments and methods, crystal growth, self-melting liquid pulling method, etc., can solve the problem of affecting the thermal insulation effect of the heat preservation cover, inconvenient installation and disassembly of the heat preservation cover, and adding graphite carbon felt Difficulty in wrapping and other issues, to achieve good heat insulation effect, shorten installation time, and save consumption

Active Publication Date: 2021-12-07
成都裕鸢航空智能制造股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the connection is loose, it will affect the thermal insulation effect of the heat preservation cover. If the connection is tight, it will increase the difficulty of wrapping the graphite carbon felt, which will bring inconvenience to the installation and removal of the heat preservation cover.
At the same time, the graphite carbon felt and the insulation cylinder are separate structures, which need to be assembled during the installation of the single crystal furnace, and the efficiency is low

Method used

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  • Supporting and heat insulation integrated heat preservation cylinder and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] An embodiment of the present invention provides an integrated thermal insulation barrel with support and heat insulation. The heat preservation barrel includes a matching inner cylinder body and an outer layer cylinder body.

[0038] The density of the outer cylinder is less than that of the inner cylinder. Specifically, the density range of the inner cylinder is 1.1~16.6 g / cm 3 , the density range of the outer cylinder is 0.12~0.22 g / cm 3 .

[0039] The outer surface of the inner cylinder is connected with the inner surface of the inner cylinder through pyrolytic carbon to form an integrated thermal insulation cylinder. The structure of the insulation cylinder is stable, the cracking is not easy to occur during use, and the service life is long.

[0040] The inner cylinder of the heat preservation cylinder includes carbon fiber mesh tires and carbon fiber cloth that are alternately laid and wound, and the inner cylinder adopts a surface density of 40~200 g / cm 2 car...

Embodiment 2

[0045] refer to figure 1 , the present embodiment provides a method for preparing a support and heat insulation integrated heat preservation cylinder, which is suitable for preparing the heat preservation cylinder described in Example 1, and the preparation method includes the following steps:

[0046] S1 preparation of the inner cylinder:

[0047] S11 uses an areal density of 40 g / cm 2 The carbon fiber mesh tire and area density is 100 g / cm 2 After the carbon fiber spread cloth is laid alternately, the mold is wound; the number of layer units is 4, and the gradient of the starting position between each layer is 4cm;

[0048]In S12, the inner layer carbon fiber prefabricated body obtained after layer laying and winding in S11 is needle-punched to form a density of 0.35 g / cm 3 The inner prefabricated body;

[0049] S13 Put the inner layer preform obtained in S12 into a vacuum furnace for chemical vapor infiltration treatment, and obtain a density of 1.1 g / cm 3 the inner cy...

Embodiment 3

[0056] This embodiment provides a method for preparing a support and heat insulation integrated heat preservation cylinder, which is suitable for preparing the heat preservation cylinder described in Example 1. The preparation method includes the following steps:

[0057] S1 preparation of the inner cylinder:

[0058] S11 uses an areal density of 100 g / cm 2 carbon fiber mesh and areal density of 300 g / cm 2 The unidirectional carbon fiber spread cloth is alternately laminated with mesh tires, 0° unidirectional fabrics or mesh tires, and 90° unidirectional fabrics, and then wraps the mold; the number of layered units is 4, and the starting position between each layer Gradient decreasing distance is 2cm;

[0059] In S12, the inner layer carbon fiber prefabricated body obtained after layer laying and winding in S11 is needle-punched to form a density of 0.60 g / cm 3 The inner prefabricated body;

[0060] S13 Put the inner layer preform obtained in S12 into a vacuum furnace for ...

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Abstract

The invention provides a supporting and heat insulation integrated heat preservation cylinder and a preparation method thereof, wherein the heat preservation cylinder comprises an inner-layer cylinder body with the density of 1.1-1.6 g / cm<3> and an outer-layer cylinder body with the density of 0.12-0.22 g / cm<3>, wherein the outer side surface of the inner-layer cylinder body is connected with the inner side surface of the outer-layer cylinder body through pyrolytic carbon. The preparation method comprises the steps: S1, preparing the inner-layer cylinder body; S2, preparing the outer-layer cylinder body outside the inner-layer cylinder body, wherein the density of the outer-layer cylinder body is smaller than that of the inner-layer cylinder body; and S3, carrying out chemical vapor infiltration treatment on the inner-layer cylinder body and the outer-layer cylinder body, and preparing the heat preservation cylinder. The heat preservation cylinder prepared by the method is stable in structure, good in heat preservation effect and easier to connect with a graphite carbon felt compared with a conventional heat preservation cylinder, the preparation process of a heat preservation cover can be simplified, and rapid mounting and dismounting of the heat preservation cylinder and the graphite carbon felt are facilitated.

Description

technical field [0001] The invention relates to the technical field of preparation of thermal field systems, in particular to a support and heat insulation integrated heat preservation cylinder and a preparation method thereof. Background technique [0002] The single crystal furnace is mainly used in the process of growing and drawing single crystal silicon in the photovoltaic industry and the semiconductor industry, and is the key equipment for preparing single crystal silicon. The quality of its internal thermal field system has a great influence on the quality of single crystal silicon. The thermal field system mainly includes pressure ring, insulation cover, insulation cover, crucible, electrode, heater and so on. Among them, the heat preservation cover is formed by wrapping graphite carbon felt outside a heat preservation cylinder. The number of wrapping layers of graphite carbon felt depends on the situation. At present, the preparation of the insulation cover is t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00C30B29/06
CPCC30B15/00C30B29/06
Inventor 周继德刘勇涛耿强喻洪
Owner 成都裕鸢航空智能制造股份有限公司
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