Large-spot horizontal end face coupler based on lithium niobate film

A horizontal end face, lithium niobate technology, applied in the coupling of optical waveguides, optical waveguides and light guides, etc., can solve problems such as gaps, limited application scenarios, mechanical instability, thermal instability, etc., to expand the size of the mode spot, solve the Effects of high optical propagation loss, good mechanical and thermal stability

Active Publication Date: 2021-12-10
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the presence of polymers in the coupler structure will bring mechanical and thermal instability, which limits its application scenarios
In addition, all the mode field distribution diameters of the above edge couplers are smaller than 2.5 μm, which is still far from the standard single-mode fiber size

Method used

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  • Large-spot horizontal end face coupler based on lithium niobate film
  • Large-spot horizontal end face coupler based on lithium niobate film
  • Large-spot horizontal end face coupler based on lithium niobate film

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Embodiment Construction

[0036] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0037] At first, the terms involved in the present invention are explained as follows:

[0038] PECVD: Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition method.

[0039] ICP: Inductively Coupled Plasm, inductively coupled plasma etching machine.

[0040] RIE: Reactive Ion Etching, reactive plasma etching machine.

[0041] Buried oxide layer: Buried Oxide Lay...

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Abstract

The invention discloses a large-spot horizontal end face coupler based on a lithium niobate film, which belongs to the technical field of integrated optical devices. The coupler comprises a double-layer inverted cone and a cladding waveguide, the double-layer inverted cone comprises an upper-layer inverted cone and a lower-layer inverted cone; the lower-layer inverted cone material is silicon dioxide and lithium niobate, and the upper-layer inverted cone material is lithium niobate; the cladding waveguide covers the double-layer inverted cone, the material of the cladding waveguide is silicon oxynitride, and the cross section of the cladding waveguide is in a dome convex shape; the lower-layer inverted cone extends to the end surface of the coupler chip; and the upper-layer inverted cone is stopped above the lithium niobate layer of the lower-layer inverted cone. According to the large-spot horizontal end face coupler based on the lithium niobate film, the spot size of the coupler is increased and the coupling efficiency of the coupler is improved under the condition that no additional photoetching step is added.

Description

technical field [0001] The invention belongs to the technical field of integrated optical devices, and more specifically relates to a large-mode spot horizontal end face coupler based on lithium niobate thin film. Background technique [0002] Lithium niobate is insoluble in water and is colorless and transparent. It belongs to the trigonal crystal system, ilmenite type (distorted perovskite type), and exhibits ferroelectricity, first-order, second-order electro-optic effect, piezoelectricity, photoelastic effect, Photoinduced birefringence effect, photovoltaic effect (band gap about 4eV), etc. Lithium niobate crystal has a negative birefringence effect, n0=2.30, ne=2.21 (affected by chemical composition), and is transparent to electromagnetic waves with wavelengths from 350nm to 5200nm. Lithium niobate crystal has a large linear electro-optic coefficient and is suitable for preparing low driving voltage, high-speed electro-optic modulators and optical switches. [0003] L...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/26G02B6/14
CPCG02B6/26G02B6/14
Inventor 夏金松胡畅然曾成瞿智成
Owner HUAZHONG UNIV OF SCI & TECH
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