Mode spot converter coupled with optical fiber and optical waveguide and manufacturing method thereof

Abstract

A mode spot converter coupled with an optical fiber and an optical waveguide and a manufacturing method thereof, wherein the mode spot converter includes: being divided into a first area, a second area, and a third area along the direction from the optical fiber to the optical waveguide; From bottom to top, it includes the substrate layer, bonding layer, and flat optical functional layer, and a buried transition optical waveguide structure is formed on the bonding layer; the second area includes the substrate layer, bonding layer, and a complete optical functional layer from bottom to top, and the A buried transition optical waveguide structure is formed on the composite layer, and the complete optical functional layer includes the flat optical functional layer in the first region, and a single-layer inverted tapered transition optical waveguide structure is formed on the optical functional layer. Along the direction from the optical fiber to the optical waveguide, the single-layer The width of the inverted tapered transition optical waveguide gradually increases in a preset manner, and the structure is used to couple light from the buried transition optical waveguide of the bonding layer to the optical waveguide of the optical function layer in the third area; the third area is from bottom to top It includes a substrate layer, a bonding layer, and a complete optical functional layer, and an optical waveguide structure is formed on the optical functional layer. Thus, a mode speckle converter solution with low coupling loss, large alignment tolerance, low process complexity, low cost and high universal applicability is realized.

Description

technical field [0001] The present application relates to the technical field of optical communication, in particular to a mode spot converter coupled with an optical fiber and an optical waveguide and a manufacturing method thereof. Background technique [0002] With the rapid development of global optical communication technology, optical signal processing integrated chips play an increasingly important role. In recent years, a new type of thin-film lithium niobate on insulator (LNOI) platform has attracted more and more attention. Due to its potential for ultra-high-speed applications, it is considered a candidate for a new generation of photonic integrated circuits. Recently, various devices based on LNOI have been reported and exhibited excellent performance, such as low-loss optical waveguides, high-Q ring resonators, tunable filters, high-speed electro-optical modulators, optical frequency combs, second harmonic generators Wait. [0003] However, there are still som...

AI Technical Summary

Problems solved by technology

Utilize double-layer inverted cone couplers to improve performance, but the mode field distribution of couplers controlled only by the geometry of the cone tip is different from that of optical fibers, so it is difficult to further improve the coupling efficiency

There is also an edge coupler composed of a double-layer tapered waveguide and a cladding waveguide, but the structure of the coupler is complex and requires two electron beam exposure overlays. The processing cost is high and the process tolerance is small, which limits its application field. waiting to be solved

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