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Pump body operation monitoring system and monitoring method

A monitoring system and pump body technology, which is applied in special data processing applications, other database retrieval, other database indexing, etc., can solve problems such as low efficiency, achieve the effects of facilitating exceptions, shortening inspection time, and improving work efficiency

Pending Publication Date: 2022-01-11
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] The purpose of the present invention is to provide a monitoring system and monitoring method for pump body operation, so as to solve the problem that the existing point inspection method can only carry out point inspection on each parameter of each pump body one by one, and the problem of low efficiency

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  • Pump body operation monitoring system and monitoring method
  • Pump body operation monitoring system and monitoring method
  • Pump body operation monitoring system and monitoring method

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Embodiment Construction

[0032] The pump body operation monitoring system and monitoring method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0033] figure 1 It is a structural diagram of a monitoring system for pump body operation provided by an embodiment of the present invention. Such as figure 1 As shown, this embodiment provides a monitoring system for pump body operation, which is designed based on the FabWorks system and includes: an interconnected database 100 , a data access layer 200 , a business logic layer 300 and an interface display layer 400 .

[0034] Wherein,...

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Abstract

The invention provides a monitoring system and a monitoring method for operation of a pump body. The system comprises a database, a data access layer, a business logic layer and an interface display layer which are connected with one another. The business logic layer is used for acquiring operation data of at least part of the pump body from the data access layer, performing first logic calculation to obtain a point inspection result of the at least part of the pump body, and transmitting the point inspection result to the interface display layer, so that the interface display layer is utilized to display the point inspection result. Therefore, the summarizing result of the multiple parameters of the multiple pump bodies at the current moment can be directly displayed, the parameters of the pumps do not need to be subjected to point inspection one by one, the point inspection time is greatly shortened, and the working efficiency is improved.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a monitoring system and a monitoring method for the operation of a pump body. Background technique [0002] In the production process of semiconductors, vacuum pumps play an important role. For example, in ion implantation process and etching process, vacuum pumps are needed, and the operation status of vacuum pumps has certain influence on product quality, production efficiency and production cost. influences. Therefore, in the production process, it is necessary to effectively monitor the operation of the vacuum pump. In the entire production equipment system, hundreds of vacuum pumps are integrated and installed. The unified management of these vacuum pumps is the key to effective management of vacuum pumps. [0003] During the production process, the spot inspection system is often used to manage the vacuum pumps in a unified manner, so that hidden dangers of equi...

Claims

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Application Information

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IPC IPC(8): G06F16/903G06F16/901G06F16/904
CPCG06F16/903G06F16/901G06F16/904
Inventor 蔡颖陈旭俞杰
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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