Self-adaptive parallel sealing and welding method for microelectronic packaging in high vacuum state
A technology of microelectronic packaging and parallel sealing and welding, which is used in auxiliary devices, welding equipment, auxiliary welding equipment, etc., to overcome short lifespan, achieve self-adaptation, and save investment costs.
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[0019] The present invention is described in detail below in conjunction with accompanying drawing:
[0020] A self-adaptive parallel sealing and welding mechanism for microelectronic packaging in a high vacuum state, comprising a high vacuum airtight chamber, in which a box-shaped frame body 315 is arranged, and in front of the front side vertical plate 316 of the box-shaped frame body 315 On the facade, an eccentric wheel 323 is provided, and an airtight casing 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, and an eccentric wheel driving motor is arranged in the airtight casing 328, and a Air, the output shaft of the eccentric wheel drive motor, after passing through the sealed magnetic fluid, is connected together with the eccentric wheel shaft 322 of the eccentric wheel 323; a U-shaped frame plate 313 is buckled on the front facade of the front side vertical plate 316, and the eccentric wheel 323 is movably arranged in the framework o...
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