Mask and mask manufacturing method
A manufacturing method and masking technology, which is applied in ion implantation plating, liquid chemical plating, coating, etc., can solve the problems of increasing the distortion of opening patterns, exceeding the tolerance of electronic components, and large deviations in tension and tension, etc., to achieve shrinking Tolerance range, avoidance of deformation or offset, effect of avoidance of errors
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[0059] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:
[0060] The invention provides a method for manufacturing a mask. Such as figure 1 As shown, in an embodiment of the present invention, the manufacturing method of the mask includes steps S910-S950. Further explanation is as follows.
[0061] Step S910 is: providing a substrate, the substrate has a surface. Step S920 is: forming a photoresist pattern on the substrate, and making the photoresist pattern cover the first part of the surface. Please also refer to figure 2 In this embodiment, the surface 100 of the substrate 10 may include the first portion 110 , and may further include the second portion 120 . The first part 110 and the second part 120 can be pre-planned virtual areas corresponding to electronic components, and for example, circuit patterns, pixel structures, etc. are also objects that can be used to plan the...
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