Method for forming image sensor
A technology for image sensors and pixel areas, applied in the direction of electric solid-state devices, semiconductor devices, electrical components, etc., to achieve the effects of improving image quality, reducing production costs, and reducing manufacturing processes
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[0027] As in the context of the background, prior art CMOS image sensors still have many problems during formation. Specific description will be described below.
[0028] In theory, the CMOS image sensor does not produce optical current when there is no light. However, during the existing CIS product manufacturing process, since the photoelectric region is formed by using high-energy ion implantation process, the crystal lattice of the substrate is damaged during ion implantation, which in turn makes a subsequent portion of the pixel point when there is no illumination. The charge is also generated, while the accumulation of charge will produce dark current. For a pixel unit, if its dark current value exceeds the photocurrent generated by capturing light electrons, the pixel unit will be considered white Pixel, so white noise is a pixel unit that is too large.
[0029] On the basis of this, the present invention provides a method of forming an image sensor, by injecting the first ...
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