Preparation method of flexible piezoelectric film

A flexible piezoelectric and thin-film technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. Inhomogeneity, low piezoelectric constant, etc., to avoid processing difficulties, improve film quality, and improve the effect of piezoelectric constant

Pending Publication Date: 2022-03-01
SUZHOU LEANSTAR ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the film prepared by the current method of preparing flexible piezoelectric film is not high in density and has many defects, and it is easy to cause high-voltage breakdown and uneven polarization in the polarization process, resulting in a low piezoelectric constant.

Method used

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  • Preparation method of flexible piezoelectric film
  • Preparation method of flexible piezoelectric film
  • Preparation method of flexible piezoelectric film

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preparation example Construction

[0024] A method for preparing a flexible piezoelectric film, such as figure 2 shown, including the following steps:

[0025] S1. Weigh polyvinylidene fluoride-trifluoroethylene powder with a content of 10-25%wt;

[0026] S2. Weighing a high boiling point solvent and a low boiling point solvent and mixing them to obtain a mixed solvent, wherein the mass ratio of the high boiling point solvent to the low boiling point solvent is: (1:4)~(4:1);

[0027] S3. Dissolving the polyvinylidene fluoride-trifluoroethylene powder in the above mixed solvent, stirring in a water bath for 1-8 hours, the temperature of the water bath is 50-80°C, and the stirring speed is 200-2000 rpm to prepare a mixed solution;

[0028] S4. Apply the mixed solution above to a flexible substrate by screen printing, spin coating or coating process to form a film, first bake at 40-80°C for 20-60min, and then bake at 80-120°C for 20-60min , and finally annealed at 120-140°C for 0.5-8 hours to obtain a semi-fini...

Embodiment 1

[0032] A method for preparing a flexible piezoelectric film, comprising the steps of:

[0033] S1. Weigh polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) powder with a content of 18%wt;

[0034] S2. Take N, N-dimethylformamide solvent and acetone solvent according to the ratio in Table 1 and mix them to prepare a mixed solvent;

[0035] S3. Dissolving polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) powder in a mixed solvent, stirring continuously, and heating in a water bath for 2 hours, the temperature of the water bath is 60° C.;

[0036] S4, bonded to the substrate by coating, first baked at 60°C for 30 minutes, then baked at 100°C for 50 minutes, and finally annealed at 130°C for 4 hours to obtain a semi-finished flexible piezoelectric film;

[0037] S5. Polarizing the annealed semi-finished flexible piezoelectric film in air at room temperature with a polarization voltage of 15 MV / cm for 20 minutes to obtain a finished flexible piezoelectric film.

[0038] Th...

Embodiment 2

[0043] A method for preparing a flexible piezoelectric film, comprising the steps of:

[0044] S1. Weigh polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) powder with a content of 15%wt;

[0045] S2, take triethyl phosphate solvent and acetone solvent and mix according to the ratio in table 2, make mixed solvent;

[0046] S3. Dissolving polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) powder in the mixed solvent, stirring continuously, and heating in a water bath for 1 hour, the temperature of the water bath is 70° C.;

[0047] S4, bonded to the substrate by coating, first baked at 80°C for 60 minutes, then baked at 110°C for 60 minutes, and finally annealed at 140°C for 4 hours to obtain a semi-finished flexible piezoelectric film;

[0048] S5. Polarizing the annealed semi-finished flexible piezoelectric film in air at room temperature with a polarization voltage of 35 MV / cm for 10 minutes to obtain a finished flexible piezoelectric film.

[0049] The piezoelectric...

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Abstract

The invention relates to a preparation method of a flexible piezoelectric film. The preparation method of the flexible piezoelectric film comprises the following steps: S1, weighing raw materials; s2, weighing a solvent; s3, heating in a water bath and dissolving; s4, patterning the mixed solution on a flexible substrate by adopting a silk-screen printing, spin-coating or coating process to form a film, firstly baking for 20-60 minutes at the temperature of 40-80 DEG C, then baking for 20-60 minutes at the temperature of 80-120 DEG C, and finally annealing for 0.5-8 hours at the temperature of 120-140 DEG C to obtain a flexible piezoelectric film semi-finished product; and S5, the annealed flexible piezoelectric film semi-finished product is polarized in the air at normal temperature, the polarization voltage is 10-35 MV / cm, the time is 1-60 min, and a flexible piezoelectric film finished product is obtained. The piezoelectric film with the high piezoelectric constant is prepared through the mixed solvent with the high boiling point and the low boiling point, and the requirement of a piezoelectric film sensor for the piezoelectric constant is met.

Description

technical field [0001] The invention relates to the technical field of piezoelectric films, in particular to a preparation method of flexible piezoelectric films. Background technique [0002] The traditional and most commonly used piezoelectric sensors mainly use piezoelectric ceramics as piezoelectric materials. Although this sensor has a long history and mature technology, piezoelectric ceramics have shortcomings such as high brittleness, high density, and poor flexibility, which cannot meet complex and diverse applications. The environment, especially in the fields of medical health, robotics, biomechanics, and smart wear, has higher requirements for the flexibility, lightness, and biocompatibility of piezoelectric materials. [0003] Copolymer polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) piezoelectric material, as a new type of polymer piezoelectric functional material, has good flexibility, high mechanical strength, easy matching of acoustic impedance, wide fr...

Claims

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Application Information

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IPC IPC(8): H01L41/45H01L41/317H01L41/257
CPCH10N30/045H10N30/077H10N30/098
Inventor 朱四美周震
Owner SUZHOU LEANSTAR ELECTRONICS TECH
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