Method for preparing LaNiO3 epitaxial conductive film by using polymer-assisted deposition method

Abstract

The invention discloses a method for preparing a LaNiO3 epitaxial conductive thin film by using a polymer-assisted deposition method, and relates to the technical field of conductive thin films, and the method comprises the following steps: S1, preparing raw materials; s2, preprocessing, and cleaning a substrate; slicing the substrate; s3, preparing a precursor, namely mixing the La source and the Ni source in the step S1, drying, pressing, carrying out primary calcination and carrying out secondary calcination; s4, placing and preparing; step S5: preparation; step S6, annealing process; and step S7, quality inspection: inspecting the quality of the film, and unifying and integrating result data. According to the preparation method, the mixing effect of the raw materials can be improved through the pulse laser deposition method and the addition of the high polymer material, so that the prepared conductive thin film has excellent conductivity, the process is simple and convenient, the surface roughness is small, and the practicability is better.

Description

technical field [0001] The invention relates to the technical field of conductive thin films, specifically the preparation of LaNiO by a polymer-assisted deposition method 3 A method of epitaxially conducting thin films. Background technique [0002] In terms of electronic devices, conductive thin films with conductivity have more important application prospects. [0003] In the existing methods for preparing conductive films, chemical solvents are often used for preparation, because the method is simple and the steps are simple, so that the surface uniformity and resistivity of the prepared conductive films are relatively high. Contents of the invention [0004] The object of the present invention is to provide and utilize macromolecule assisted deposition method to prepare LaNiO 3 The method of epitaxial conductive film has the advantages of pulse laser deposition method, supplemented by the addition of polymer materials, which can improve the mixing effect of raw mate...

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Problems solved by technology

[0003] In the existing preparation methods of conductive films, chemical solvents are often used for preparation, because the method is simple and the steps are simple, so that the surface uniformity and resistivity of the prepared conductive films are relatively high

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