Graphene surface acoustic wave filter structure and preparation method thereof

Abstract

The invention discloses a graphene surface acoustic wave filter structure and a preparation method thereof, and relates to the field of graphene surface acoustic wave filter structures, the graphene surface acoustic wave filter structure comprises a piezoelectric substrate, a metal electrode layer is fixedly arranged above the piezoelectric substrate, a graphene layer is fixed on the outer ring of the metal electrode layer in a film coating mode, and the connection structure between the graphene layer and the metal electrode layer is firm. The graphene layer is arranged on the surface of the metal electrode layer instead of being attached to the surface of the metal electrode layer, the graphene layer is not prone to falling off due to high temperature when current passes through the metal electrode layer, and high-frequency signals are transmitted on the surface of the metal electrode layer according to the skin effect principle by means of the characteristics of high heat conductivity and high conductivity of graphene. Current is concentrated on the graphene layer on the surface layer, heat loss caused by the metal electrode layer is reduced due to the high conductivity of the graphene layer, so that insertion loss caused by resistance of the interdigital transducer is reduced, meanwhile, the heat dissipation capacity of the surface acoustic wave filter is improved due to the graphene layer with the high heat conductivity, and the effect of improving power tolerance is achieved.

Description

technical field [0001] The invention relates to the field of graphene surface acoustic wave filter structure, in particular to a graphene surface acoustic wave filter structure and a preparation method thereof. Background technique [0002] SAW filters are playing an increasingly important role in modern communication systems. Several or even dozens of SAW filters are involved in base station construction, satellite communications, and personal mobile communication equipment. With the continuous increase of the communication frequency band, the communication equipment is becoming more and more complex, and the size of the filter module is also being continuously reduced. In order to obtain large capacity and high speed at the same time, the communication filter is required to have lower insertion loss and higher power resistance. Receptivity. [0003] Research on reducing the insertion loss of surface acoustic wave filters is a hot topic in the field of surface acoustic wav...

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Problems solved by technology

[0006] However, in the above-mentioned patents, the graphene dielectric layer is directly covered on the surface of the metal electrode layer, and the actual bonding between the two is poor. Especially in a conductive and high-heat environment, the graphene dielectric layer is easy to expand, thereby increasing The gap between the graphene dielectric layer and the surface of the metal electrode layer makes the surface contact area of ​​the graphene dielectric layer and the metal motor layer smaller, thereby reducing the heat dissipation capacity of the surface acoustic filter

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