Slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor

Abstract

The invention relates to a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor. The slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor comprises a silicon waveguide; the nanometer beam cavity is positioned on the silicon waveguide; a plurality of through holes are etched in the nanometer beam cavity, the plurality of through holes are symmetrical about the center of the silicon waveguide, a slit is formed in the plurality of through holes, and the slit penetrates through the plurality of through holes. According to the invention, the low-concentration detection lower limit of the cancer early marker microRNA can be obtained.

Description

Technical field [0001] The present invention relates to the field of photonic crystal sensor technology, in particular to a one-dimensional photonic crystal nanobeadminal cavity biosensor embedded in a slit. Background [0002] Cancer has become the leading cause of death in noncommunicable diseases worldwide, and the lower limit of detection of microRNAs, a marker of early cancer, can improve cancer five-year survival and reduce cancer mortality. Photonic crystal sensing technology can use the label-free surface modification reaction to achieve the lower limit detection of microRNAs at low concentrations, and has the advantages of strong anti-interference ability and easy integration, which has gradually become a hot topic in the field of biomedical sensing. [0003] At present, the sensing research on the nano-beam cavity of one-dimensional photonic crystals is mainly used for gas sensing, focusing on the optimization of quality factors, and the research on the lower limit of ...

AI Technical Summary

Problems solved by technology

[0004] Problems existing in the existing one-dimensional photonic crystal nano-beam cavity biosensor: 1. The dielectric mode one-dimensional photonic crystal nano-beam cavity works in the C band of the communication band, resulting in excessive absorption loss and Q value (quality factor) of the biosensor working in aqueous solution. ) attenuation is obvious; 2. In the dielectric mode one-dimensional photonic crystal nanobeam cavity, the light field is mainly localized in the high refractive index region to obtain a high quality factor, resulting in a small overlapping volume between the biological target and the light field, and poor refractive index sensitivity. High problem; 3. High-quality factor dielectric mode one-dimensional photonic crystal nanobeam cavity test requires high-resolution optical test system, and the robustness of manufacturing process error is low

Images