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Bulk acoustic wave magnetic field sensor based on magnetoelectric coupling and optimization method thereof

A magnetic field sensor and magnetoelectric coupling technology, applied in the direction of the size/direction of the magnetic field, multi-objective optimization, design optimization/simulation, etc., can solve the problems that the research of micro-magnetic field sensor system is still rare, and achieve excellent performance and easy integration Effect

Pending Publication Date: 2022-05-10
SOUTHWEAT UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are few systematic studies on materials, structures, device simulations, and performance optimization of BAW-driven and micro-magnetic field sensors.

Method used

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  • Bulk acoustic wave magnetic field sensor based on magnetoelectric coupling and optimization method thereof
  • Bulk acoustic wave magnetic field sensor based on magnetoelectric coupling and optimization method thereof
  • Bulk acoustic wave magnetic field sensor based on magnetoelectric coupling and optimization method thereof

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Embodiment Construction

[0043] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0044] Before describing the specific embodiments of the present invention, in order to make the scheme of the present invention more clear and complete, at first the abbreviations and key term definitions that appear in the present invention are explained:

[0045] ME coupling coefficient: The magnitude of the electric field required to cause a change in unit magnetic field strength indicates the magnetic field / electric field energy conversion efficiency of the magnetoelectric heterostructure.

[0046] Such as figure 1 Shown, the present invention provides a kind of bulk acoustic wave magnetic field sensor based on magnetoelectric coupling, comprise magnetic composite film and bulk acoustic wave resonator; Magnetic composite film comprises FeGaB magnetostrictive film and the Al inserted in FeGaB magnetostrictive film 2 o 3Thin film; bulk acoustic wa...

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Abstract

The invention discloses a magnetoelectric coupling-based bulk acoustic wave magnetic field sensor and an optimization method thereof. The magnetoelectric coupling-based bulk acoustic wave magnetic field sensor structurally comprises a magnetic composite film and a bulk acoustic wave resonator, the magnetic composite thin film comprises a FeGaB magnetostrictive thin film and an Al2O3 thin film inserted into the FeGaB magnetostrictive thin film; the bulk acoustic wave resonator comprises a Mo electrode film, an AIN piezoelectric film and a silicon substrate which are arranged in sequence. According to the bulk acoustic wave magnetic field sensor, the composite magnetic film is adopted, eddy current loss is restrained, and the soft magnetic characteristic is enhanced; meanwhile, a piezomagnetic phase / piezoelectric phase double-layer structure design is adopted, so that the magnetoelectric (ME) coupling efficiency is improved; the resonance is utilized to enhance the ME coupling effect, and the thickness of the piezoelectric phase / piezomagnetic phase and the electrode layer is designed, so that the sensor works at the ferromagnetic resonance frequency of the composite film, and the energy conversion efficiency is further improved. Therefore, the performance optimization method of the bulk acoustic wave magnetoelectric coupling magnetic field sensor is obtained.

Description

technical field [0001] The invention belongs to the technical field of bulk acoustic wave magnetic field sensor optimization, and in particular relates to a bulk acoustic wave magnetic field sensor based on magnetoelectric coupling and an optimization method thereof. Background technique [0002] Magnetic field sensors driven by bulk acoustic waves (BAW) have attracted extensive attention due to their high sensitivity, frequency up to GHz, and small size. Strong strain-mediated magnetoelectric (ME) coupling in magnetoelectric heterostructures demonstrates favorable energy conversion between magnetic and electric fields. It shows great potential in practical devices such as sensors and tunable radio frequency (RF) / microwave devices. The ME coupling effect originates from the piezoelectric effect of the piezoelectric phase and the magnetostrictive effect of the piezoelectric phase. Generally, there are two types of ME heterostructures, namely, bulk ME composites and thin-film...

Claims

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Application Information

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IPC IPC(8): G06F30/23G16C60/00G16C10/00G01R33/02G06F111/06G06F113/26G06F119/14
CPCG06F30/23G16C60/00G16C10/00G01R33/02G06F2113/26G06F2111/06G06F2119/14
Inventor 任万春李金桐顾志均刘国陈锶陈佳荣李建波李君儒高杨
Owner SOUTHWEAT UNIV OF SCI & TECH
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