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Hyperspectral system based on MEMS and spectrometer

A technology of hyperspectral and spectroscopic systems, applied in spectrometry/spectrophotometry/monochromator, instruments, scientific instruments, etc., can solve the problem of inability to collect spectral information at one time, unable to image multiple points at one time, and low energy sensitivity and other problems, to achieve the effect of improving the spectral wavelength range, small size and high resolution

Pending Publication Date: 2022-05-13
浙江微翰科技有限公司
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Problems solved by technology

[0008] The present invention aims at problems in the application of hyperspectral imaging systems in the prior art, such as the inability to perform multi-point imaging at one time, the inability to collect spectral information in a large wavelength range (thousands or even thousands of nanometers) at one time (low efficiency), low resolution, signal noise, etc. To solve the problems of low ratio (low energy sensitivity), large volume, and high cost, a MEMS-based hyperspectral system and spectrometer are provided

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  • Hyperspectral system based on MEMS and spectrometer
  • Hyperspectral system based on MEMS and spectrometer
  • Hyperspectral system based on MEMS and spectrometer

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Embodiment 1

[0036] The spectral imaging device is used to obtain almost continuous spectral data of each pixel while obtaining a large number of narrow-band continuous spectral images of ground objects. Spectral imaging devices are divided into multispectral imaging devices, hyperspectral imaging devices, and hyperspectral imaging devices according to the spectral resolution of the sensor. The spectral resolution of the multi-spectral imaging device is on the order of delta_lambda / lambda=0.1, and there are generally only a few bands in the visible and near-infrared regions. The spectral resolution of the hyperspectral imaging device is on the order of delta_lambda / lambda=0.01, and there are tens to hundreds of bands in the visible and near-infrared regions, and the spectral resolution can reach the nm level. The spectral resolution of the hyperspectral imaging device is on the order of delta_lambda / lambda=0.001, and can reach thousands of wavebands in the visible and near-infrared regions...

Embodiment 2

[0040] In order to solve the above-mentioned problems, the application also provides a hyperspectral system based on MEMS, including a light source and a beam processing unit, and it also includes an interference system 160. The interference system 160 includes a MEMS translation micromirror 163, and the light source is processed by the beam processing unit The light beam 142 enters the MEMS translational micromirror 163 , and the MEMS translational micromirror 163 modulates and reflects the light beam 142 .

Embodiment 3

[0042] On the basis of Embodiment 2, the interference system 160 of this embodiment also includes a third beam splitting system 161 and a plane fixed mirror 162; the light beam 142 is divided into two beams of light through the third beam splitting system 161, one beam enters the plane fixed mirror 162, and passes through the plane mirror 162. The plane fixed mirror 162 returns to the third beam splitting system 161 , and the other beam enters the MEMS translational micromirror 163 and returns to the third beam splitting system 161 through the MEMS translational micromirror 163 .

[0043] This embodiment also includes that the micromirror unit 150 includes a first lens 152 and a second lens 153; the light beam 142 is used as the input of the micromirror unit 150, and is transmitted to the MEMS scanning micromirror 151 by the first lens 152, and then reflected by the second lens 153 output. The light beams 142 transmitted by the first lens 152 are read one by one by rotating th...

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Abstract

The invention relates to a hyperspectral imaging technology, and discloses an MEMS-based hyperspectral system and spectrograph, the MEMS-based hyperspectral system comprises a light source (121), a light beam processing unit and MEMS scanning micromirrors (151), and the MEMS scanning micromirrors (151) are array type scanning micromirrors; light beams (142) of the light source (121), which are processed by the light beam processing unit, enter the MEMS scanning micromirror (151), and the light beams (142) are sequentially reflected by the MEMS scanning micromirror (151) as required; the interference system (160) comprises an MEMS translation micro-mirror (163), a light beam (142) reflected by the MEMS scanning micro-mirror (151) enters the MEMS translation micro-mirror (163), and the MEMS translation micro-mirror (163) modulates and reflects the light beam (142); the spectrometer designed by the invention is small in size, high in resolution, good in stability and low in cost.

Description

technical field [0001] The invention relates to a hyperspectral imaging technology, in particular to a MEMS-based hyperspectral system and a spectrometer. Background technique [0002] Hyperspectral imaging technology is formed by the cross fusion of spectroscopy and image technology. It is a technology that uses spectral information to conduct qualitative and quantitative analysis of substances while conducting research on the shape, size and distribution of targets through image information. At present, it is widely used in agriculture, food safety, medical diagnosis, environmental engineering, geological exploration, fishery and safety and other fields. [0003] The imaging data obtained by the hyperspectral imaging device is a spectral image cube, which includes two-dimensional image information and one-dimensional spectral information. [0004] At present, two-dimensional image sensors are used in hyperspectral imaging devices. The detector is a two-dimensional detecto...

Claims

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Application Information

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IPC IPC(8): G01J3/28G01J3/02G01J3/06
CPCG01J3/2823G01J3/0208G01J3/021G01J3/0289G01J3/0291G01J3/06G01J2003/064
Inventor 薛原赵瑞凡凌明韩中旭
Owner 浙江微翰科技有限公司
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