TiAlMoNbW high-entropy alloy nitride film and preparation process thereof

A high-entropy alloy and preparation process technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems that limit the wide application of high-entropy alloy coatings, surface unevenness, and cladding layer cracking sensitivity Obvious and other problems, to achieve the effect of increasing strength and hardness, improving mechanical properties, and reducing surface roughness

Active Publication Date: 2022-06-21
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And the commonly used method for preparing thin films is laser cladding, but it is prone to various defects, the surface is uneven, and the cracking sensitivity of the cladding layer is obvious, which limits the wide application of high-entropy alloy coatings

Method used

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  • TiAlMoNbW high-entropy alloy nitride film and preparation process thereof
  • TiAlMoNbW high-entropy alloy nitride film and preparation process thereof
  • TiAlMoNbW high-entropy alloy nitride film and preparation process thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] 1. Prepare the target material: choose a disk-shaped TiAlMoNbW high-entropy alloy target containing five elements of Ti, Al, Mo, Nb, and W, and the atomic ratio of its constituent elements is Ti:Al:Mo:Nb:W=1:1 :1:1:1at.%. The diameter of the target is 101.6 mm, and the thickness of the target is 3 mm. The preparation of the target material in this embodiment specifically includes the following steps:

[0042] a. Prepare Ti, Al, Mo, Nb metal blocks, and W metal powder according to the composition ratio;

[0043] b. Master alloy refining:

[0044] b1. First add two metal blocks of Ti and Al with a melting point lower than 2000K and an atomic ratio of 1:1 for smelting to obtain a TiAl master alloy;

[0045] b2. Add Mo and Nb metal blocks with a melting point lower than 3000K with an atomic ratio of 1:1 for smelting to obtain a TiAlMoNb master alloy;

[0046] c. Preparation of TiAlMoNb master alloy powder: crush and refine the TiAlMoNb master alloy to obtain 150-300 mes...

Embodiment 2

[0066] 1. Prepare the target material: choose a disk-shaped TiAlMoNbW high-entropy alloy target containing five elements of Ti, Al, Mo, Nb, and W, and the atomic ratio of its constituent elements is Ti:Al:Mo:Nb:W=1:1 :1:1:1at.%. The diameter of the target is 101.6 mm, and the thickness of the target is 3 mm. The preparation of the target material in this embodiment specifically includes the following steps:

[0067] a. Prepare Ti, Al, Mo, Nb metal blocks, and W metal powder according to the composition ratio;

[0068] b. Master alloy refining:

[0069] b1. First add two metal blocks of Ti and Al with a melting point lower than 2000K and an atomic ratio of 1:1 for smelting to obtain a TiAl master alloy;

[0070] b2. Add Mo and Nb metal blocks with a melting point lower than 3000K with an atomic ratio of 1:1 for smelting to obtain a TiAlMoNb master alloy;

[0071] c. Preparation of TiAlMoNb master alloy powder: crush and refine the TiAlMoNb master alloy to obtain 150-300 mes...

Embodiment 3

[0088] 1. Prepare the target material: choose a disk-shaped TiAlMoNbW high-entropy alloy target containing five elements of Ti, Al, Mo, Nb, and W, and the atomic ratio of its constituent elements is Ti:Al:Mo:Nb:W=1:1 :1:1:1at.%. The diameter of the target is 101.6 mm, and the thickness of the target is 3 mm. The preparation of the target material in this embodiment specifically includes the following steps:

[0089] a. Prepare Ti, Al, Mo, Nb metal blocks, and W metal powder according to the composition ratio;

[0090] b. Master alloy refining:

[0091] b1. First add two metal blocks of Ti and Al with a melting point lower than 2000K and an atomic ratio of 1:1 for smelting to obtain a TiAl master alloy;

[0092] b2. Add Mo and Nb metal blocks with a melting point lower than 3000K with an atomic ratio of 1:1 for smelting to obtain a TiAlMoNb master alloy;

[0093] c. Preparation of TiAlMoNb master alloy powder: crush and refine the TiAlMoNb master alloy to obtain 150-300 mes...

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Abstract

The invention relates to a TiAlMoNbW high-entropy alloy nitride film and a preparation process thereof, the component expression is TiaAlbMocNbdWeNx, a: 4-9, b: 4-8, c: 1-6, d: 6-10, e: 5-9, x: 55-70, a + b + c + d + e + x = 100, the film is of a columnar nanocrystalline structure, and the grain size is 10-70 nm. The high-entropy alloy nitride film has high wear resistance, high corrosion resistance and high mechanical property.

Description

technical field [0001] The invention relates to the field of surface modification, in particular to a TiAlMoNbW high-entropy alloy nitride film and a preparation process thereof. Background technique [0002] High-entropy alloy is a new type of multi-principal alloy material composed of five or more elements in (nearly) equal atomic ratios. Since high-entropy alloys are different from traditional alloys from the design concept, an equal atomic ratio or similar atomic ratio is selected. Multiple elements with an equal atomic ratio are the main elements, which determines that high-entropy alloys have different characteristics from traditional alloys. However, compared with traditional alloy materials, the research and development of high-entropy alloys started late, the experimental basis is relatively weak, and the theoretical work is still not detailed enough. As a result, although the new alloy has great application potential, there is still a lot to achieve industrial prod...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06
CPCC23C14/34C23C14/0641
Inventor 王方方张虎高明
Owner BEIHANG UNIV
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