Flexible strain sensor based on vertical graphene and preparation method thereof

Abstract

The invention provides a flexible strain sensor based on vertical graphene and a preparation method thereof, according to the method, a high-temperature-resistant flexible material is used as a substrate, an inductively coupled plasma chemical vapor deposition method is combined, and the flexible strain sensor based on the vertical graphene is prepared in a transfer-free manner at the temperature of 600-700 DEG C. Wherein the adopted flexible substrate is fluorine crystal mica, can tolerate high temperature as high as 1100 DEG C, has good flexibility when the thickness is 500 microns, and serves as a good substrate for growing the vertical graphene, so that the situation that the performance of the sensor is reduced due to the fact that the structure is damaged in the transfer process of the vertical graphene is avoided; and the etching liquid used in the transfer process is also prevented from damaging the environment or influencing the health of a human body. In addition, the copper interdigital electrode and the vertical graphene are combined, ohmic contact is improved, and the response performance of the flexible strain sensor can be improved.

Description

technical field [0001] The invention belongs to the application field of wearable flexible sensors, and relates to a flexible strain sensor based on vertical graphene and a preparation method thereof. Background technique [0002] Vertical graphene, as a graphene-like material with a dendritic three-dimensional structure, is mainly composed of few layers of graphene-containing carbon nanosheets vertically grown on the substrate. It not only possesses the excellent properties of graphene, but also Has a special three-dimensional structure. It is mainly composed of three components, from top to bottom, the edge of few-layer graphene, the vertically independent few-layer graphene-containing carbon nanosheets (CNSs), and the few-layer graphene-containing base layer (substrate layer). Since vertical graphene is a few-layer graphene structure, it has many basic properties of graphene materials, such as high electrical conductivity, thermal conductivity, chemical stability, large ...

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Problems solved by technology

Therefore, the three-dimensional structure of vertical graphene prepared by this method will inevitably be destroyed during the transfer process, and metal residues will also be produced, which will affect the performance of the sensor.

At the same time, the flexible sensor based on vertical graphene prepared by this method has low repeatability, and chemicals such as etching solution used in the transfer process will pollute the environment and endanger human health.

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