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Manufacture of tubular targets

A manufacturing method and tube target technology, applied in manufacturing tools, foundry workshops, foundry equipment, etc., can solve problems affecting stoichiometric adjustment, difficulties, etc.

Inactive Publication Date: 2005-04-13
MATERION ADVANCED MATERIALS GERMANY GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Dissolved oxygen affects the internal structure and creates difficulties in stoichiometric adjustment during oxide deposition

Method used

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  • Manufacture of tubular targets
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  • Manufacture of tubular targets

Examples

Experimental program
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Effect test

example 1

[0034] An inner tube made of high-quality steel (127 mm inner diameter, 133 mm outer diameter, 1500 mm long) was welded to its outer diameter with a commercially available flux with tin. The welded inner tube is placed in the center of the mold halves. The casting mold is heated from the outside to about 300° C. by means of a heating pad, and the inner tube is likewise heated to about 300° C. on its inner diameter by means of a hot air blower. through a siphon (see figure 1 ) in the melting crucible communicated with the casting mold with argon atmosphere to protect the melting purity of 99.99% tin. The molten tin flows into the mold through a heated pipe and fills the cavity between the inner tube and the mold until it reaches the upper edge of the mold. Then stop the hot air blower and stop heating and remove the heating pads arranged in sequence from the bottom of the mold. At the upper end of the mold, the molten tin is supplied to prevent the metal level from falling. ...

example 2

[0037]An inner tube made of high-quality steel (127 mm inner diameter, 133 mm outer diameter, 1500 mm long) was welded to its outer diameter with a commercially available flux with zinc. The welded inner tube is placed in the center of the mold halves. The casting mold is heated to 500° C. from the outside by means of a heating pad, and the inner tube is likewise heated to approx. 500° C. on its inner diameter by means of a hot air blower. through a siphon (see figure 1 ) in the melting crucible in communication with the casting mold to protect the molten zinc with an argon atmosphere. Molten zinc flows into the mold through a heated pipe and fills the cavity between the inner tube and the mold until it reaches the upper edge of the mold. The thermal inner blower is then stopped and heating is stopped and the heating pads are removed in sequence from the bottom of the mold. At the upper end of the mold, the molten zinc is supplied to prevent the molten metal from falling. ...

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Abstract

A process for producing a tube target for cathode sputtering plants, in which the tube target is formed from a metallic inner tube (target holder) made of a first material with a first melting point of Ts1>=900 K and a metallic outer tube (target) that concentrically surrounds the inner tube and that is made of a second material with a second melting point of Ts2<=800 K. The inside diameter of the outer tube and the outside diameter of the inner tube are proportioned in such a way that the two tubes fit together tightly and are mechanically firmly joined. The outer tube is formed by casting the second material in a molten state in a heated, vertical, cylindrical permanent mold, which has a heated mandrel that constitutes the inner tube. After a space between the mold and the inner tube has been filled with the molten second material, a first thermal gradient develops between the inner tube and the mold, a second thermal gradient develops between the bottom and the top of the mold, and the outer tube is simultaneously cooled from the inside to the outside and from the bottom to the top.

Description

Field of Invention [0001] The present invention relates to a method for manufacturing a tube target of a cathode sputtering apparatus. The tube target consists of a metal inner tube and a metal outer tube concentrically surrounding the inner tube. wherein the inner tube has a first melting point T S1 ≥900K of the first material, and the outer tube is made of a second melting point T S2 It is made of the second material of ≤800K, and the inner diameter of the outer tube and the inner diameter of the inner tube are mechanically and fixedly connected in a form-fitting manner. Furthermore, the present invention relates to the application of such a method. technical background [0002] Compared with planar targets, tubular or rotating targets are increasingly preferred for the production of thin layers because of the higher material utilization that can be achieved during deposition (also known as sputtering). Tube targets are particularly advantageous for producing thin oxid...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34B22D19/16B22D27/04
CPCB22D19/16C23C14/3414B22D9/006B22D27/04
Inventor R·赫克R·于特纳D·卢普顿E·迈尔P·麦恩茨H·曼哈德特B·施滕格H·青格
Owner MATERION ADVANCED MATERIALS GERMANY GMBH
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