Method and apparatus for measuring and analyzing structure and component of combined sample

Abstract

The invention relates to a process and apparatus for measuring and analyzing the structure and component of a combination sample, wherein an X-ray source and an X-ray lens form incident light path, an energy detector is arranged on the diffraction light path, the divergent white light set out by the X-ray source is focused into parallel micro convergent beams onto the sample platform through an X-ray lens, then an energy detector receives the diffracted X-rays and fluorescent X-rays from the tested sample, and transmit them into the computer for data processing, thus obtaining the diffraction spectrum and fluorescence spectrum and analyzing the structure and constitution.

Description

Technical field: [0001] The invention relates to a method and a device for measuring and analyzing structures and components by using X-ray diffraction and X-ray fluorescence techniques simultaneously. Background technique: [0002] At present, when analyzing the crystal structure and composition of materials, X-ray diffraction technology is usually used. The most conventional one is angle dispersive X-ray diffraction (XRD for short), which uses single-wavelength X-rays (monochromatic light, monochromatic before or after diffraction) to irradiate the material sample, so that the distance between the sample surface and the detector is θ -2θ continuous scanning, obtained to satisfy the diffraction formula 2dsinθ=λ 0 Diffraction pattern of (d is crystal plane distance, is the structure parameter of sample material, θ is diffraction angle, λ 0 is the wavelength of X-rays), that is, the relationship curve between the diffraction intensity and the diffraction angle θ, and then c...

AI Technical Summary

Problems solved by technology

Because of the large divergence of incident light, it can only be used for the structural measurement of single crystal or epitaxial film samples, and cannot measure polycrystalline samples (see M. Ohtania, etc. Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thinfilms , Appl. Phys. Lett. 79, P3594-3596, 2001)

[0008] Although the above technologies can be adopted by general laboratories, each has its own advantages and disadvantages: the advantage of scheme ① is that the slow mechanical linkage scanning is canceled, and the disadvantage is that the X-rays are not focused; the advantage of scheme ② is that the X-rays are focused, but the scanning The speed is slow; scheme ③ can only be applied to single crystal or epitaxial samples

Images