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Direct heating terminal type micro electronic mechanical system microwave power sensor and its producing method

A technology of microelectronic machinery and microwave power, which is applied in the fields of electric power measurement by thermal method, optical mechanical equipment, metal processing machinery parts, etc. It can solve the problems of inability to integrate digital and analog circuits, low burning level, slow response, etc., and achieve easy High reliability, simple integration, fast response effect

Inactive Publication Date: 2007-02-14
SOUTHEAST UNIV
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The traditional power meter uses a thermoelectric power sensor in the form of a waveguide: bismuth-antimony is commonly used as a thermocouple, and a coaxial cable is used as a transmission line. Its main disadvantages are slow response, low burnout level, and attenuators are used when measuring high power. Integration with digital and analog circuits

Method used

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  • Direct heating terminal type micro electronic mechanical system microwave power sensor and its producing method
  • Direct heating terminal type micro electronic mechanical system microwave power sensor and its producing method
  • Direct heating terminal type micro electronic mechanical system microwave power sensor and its producing method

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Embodiment Construction

[0031] specific implementation plan

[0032] The structure of the direct heating terminal MEMS microwave power sensor of the present invention has been designed based on a GaAs MMIC process. The direct heating terminal MEMS microwave power sensor structure based on GaAs MMIC technology uses thermocouples as terminal loads, converts the energy input from the coplanar waveguide into heat, and then converts it into voltage to measure the microwave power. In terms of structure The sensor includes a substrate 1, coplanar waveguide ground wires 2, 3, coplanar waveguide signal wires 4, gold thermocouple arms 5, 6, AlGaAs thermocouple arms 7, 8, pads 9, 10, 11, 12, 13 , ohmic contacts 14, 16, 17, and medium 15; wherein, AlGaAs thermocouple arms 7, 8, and medium 15 are directly located on substrate 1, and coplanar waveguide ground wires 2, 3, and coplanar waveguide signal line 4 are located in the middle of medium 15 , the coplanar waveguide ground wires 2, 3,...

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Abstract

The invention is an electron mechanism microwave power sensor whose end can be heated directly and its manufacturing method. The method uses terminal load to realize the power absorption and converted into heat energy, measures the input power with temperature measurement, the structure uses thermocouple as terminal load, and converts the energy inputted from the coplanar waveguide, then measures the size of power by converting it into voltage mode. In the structure, the sensor includes substrate, coplanar waveguide grounding wire, coplanar waveguide signal wire, gold thermocouple arm, AlGaAs thermocouple arm, bonding pad, ohm contact, media; the manufacturing steps are: GaAs substrate preparation, AlGaAs depositing, ion injection and mixing, AlGaAs photoetching and etching out the thermocouple arm, depositing AUGE co-crystal, Ni and Au, photoetching, high temperature quenching, depositing SION media layer, depositing the metal and etching out the coplanar waveguide and part of thermocouple pipe, depositing media layer, producing the bonding pad.

Description

technical field [0001] The invention is a structure that utilizes the form of terminal load to realize power absorption and conversion into heat, and measures input power by measuring thermoelectric potential, and belongs to the technical field of micro-electro-mechanical system (MEMS) manufacturing. Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. In the research of microwave signal generation, transmission and reception, etc., microwave power measurement is indispensable, and it has become an important part of electromagnetic measurement. There are a lot of research in this field at home and abroad, but there are still few microstructure microwave power sensors developed by MEMS (micro-electro-mechanical system technology), and our country has researched this aspect for many years. [0003] The traditional power meter uses a thermoelectric po...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R21/04B81C3/00
Inventor 廖小平陈宁娟
Owner SOUTHEAST UNIV
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