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Thin-film self-assembling air sensitive device and production of for determining animal food freshness

A gas sensor, animal food technology, applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve the problems of device parameter consistency, poor repeatability, high working temperature, low resistance, etc., to achieve uniform device parameters, High selectivity, high consistency effect

Inactive Publication Date: 2007-04-04
SHANDONG NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] TiO 2 In metal oxide semiconductors, the sensitivity to trimethylamine (TMA) occupies the first place, but the inherent chemical and physical characteristics fatally affect the low resistance level of sensitive devices, making the operating temperature of trimethylamine gas sensitive devices higher (about 370°C) About), and the consistency and repeatability of the device parameters are poor
Although a series of measures such as semiconducting, heavy doping, and long-term heat treatment have been taken to obtain a significant low-resistance effect, and at the same time maintain a high sensitivity to trimethylamine, there is still a large heating power (generally 750mw), which seriously Limits the development of such devices in the direction of miniaturization, micro-power consumption, and integration
In recent years, some people have used the side-heating structure to prepare zinc oxide films by radio frequency magnetron sputtering, and added metal oxides such as aluminum oxide, titanium dioxide, and vanadium pentoxide to the target. Although it shows good sensitivity and low working temperature to trimethylamine, it is difficult to precisely control the repeatability of film growth thickness, which causes serious drift of device parameters; some people also use organic chemical vapor deposition (MOCVD) technology to prepare SnO 2 For thin-film devices, the working temperature is reduced to about 200°C, but the sensitivity is low; some people use TiCl 4 and V 2 o 5 As a source, TiO was prepared by plasma-enhanced chemical vapor deposition (PECVD) 2 / V 2 o 5 Double-layer thin film, the results show that the device has a lower operating temperature (about 200 ° C) and also shows fast response and recovery characteristics, but the sensitivity is still far from the actual demand

Method used

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  • Thin-film self-assembling air sensitive device and production of for determining animal food freshness
  • Thin-film self-assembling air sensitive device and production of for determining animal food freshness
  • Thin-film self-assembling air sensitive device and production of for determining animal food freshness

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] 1. Select Al with a thickness of 0.2mm 2 o 3 The chip is a substrate 8, and the design size is length × width = 1.8 × 2mm 2 A pair of long gold electrodes 10 and a pair of short gold electrodes 11 are printed on the back of the substrate 8 by screen printing method-drying; a pair of gold electrodes 12 are printed on the positive side and sintered at a temperature of 700°C.

[0030] 2. Use the punching method to connect the gold electrode 12 on the positive side to the short gold electrode 11 on the back side (as the electrode of the sensitive layer), and then sinter four Pt wires 6 on a pair of long gold electrodes 10 and a pair of short gold electrodes 11 on the back side .

[0031] 3, on the back of the substrate 8 with RuO 2 Slurry was used as raw material to print RuO by screen printing 2 →drying→sintering at 800℃ to make RuO 2 The resistance value of the resistance heater 9 is controlled at 80Ω, and is covered and protected with a glass film.

[0032] 4. Prep...

Embodiment 2

[0036] 1. Select Al with a thickness of 0.2mm 2 o 3 The chip is the substrate 8, and the design size is length × width = 1.5 × 1.5mm 2 A pair of long gold electrodes 10 and a pair of short gold electrodes 11 are printed on the back of the substrate 8 by screen printing method-drying; a pair of gold electrodes 12 are printed on the positive side and sintered at a temperature of 850°C.

[0037] 2. Use the punching method to connect the gold electrode 12 on the positive side to the short gold electrode 11 on the back side (as the electrode of the sensitive layer), and then sinter four Pt wires 6 on a pair of long gold electrodes 10 and a pair of short gold electrodes 11 on the back side .

[0038] 3, on the back of the substrate 8 with RuO 2 Slurry was used as raw material to print RuO by screen printing 2 →drying→sintering at 850℃ to make RuO 2 The resistance value of the resistance heater 9 is controlled at 100Ω, and is covered and protected with a glass film.

[0039] 4....

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Abstract

A gas-sensitive device for testing freshness is prepared as connecting lead with pin at one end to metal cup, setting pistil plate between pins of the apparatus in heater type, using double layer of stainless steel screen to cover the pistil pate which uses Al2O3 as base plate (BP); setting a pair of long metal electrode (ME), a pair of short ME and four Pt wires on BP back; having RuO2 heater on long ME top; connecting a pair of ME on BP face to a pair of short ME at back and having sensitive layer on ME top.

Description

technical field [0001] The invention belongs to the category of oxide semiconductors, and belongs to the technical field of thin film gas sensor elements. Specifically related to TiO 2 Nanofilm and TiO 2 A self-assembled animal food sensor based on a multi-element metal oxide thin-film trimethylamine gas sensor and a manufacturing method. Background technique [0002] TiO 2 In metal oxide semiconductors, the sensitivity to trimethylamine (TMA) occupies the first place, but the inherent chemical and physical characteristics fatally affect the low resistance level of sensitive devices, making the operating temperature of trimethylamine gas sensitive devices higher (about 370°C) About), and the consistency and repeatability of device parameters are poor. Although a series of measures such as semiconducting, heavy doping, and long-term heat treatment have been taken to obtain a significant low-resistance effect, and at the same time maintain a high sensitivity to trimethylam...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12G01N27/04G01N27/26H01L49/00H10N99/00
Inventor 裴素华黄萍
Owner SHANDONG NORMAL UNIV