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Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes

An anti-static and X-ray technology, applied in X-ray tubes, X-ray equipment, static electricity, etc., can solve the problems of long X-ray wavelength and poor thermal characteristics of X-ray generating devices, and achieve the purpose of suppressing heating temperature, small size, The effect of eliminating static electricity

Inactive Publication Date: 2007-05-16
釜山科技园财团法人 +1
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  • Summary
  • Abstract
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AI Technical Summary

Problems solved by technology

[0009] However, the wavelength of X-rays generated by these conventional technologies is very long, and the thermal characteristics of the X-ray generating device are not excellent

Method used

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  • Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes
  • Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes
  • Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes

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specific Embodiment approach

[0045] Fig. 2 is a structural diagram of an embodiment of the antistatic device utilizing soft X-rays of the present invention. As shown in the figure, the anti-static device 1000 includes an anti-static head 100 for generating soft X-rays, a soft X-ray protection part 200 that surrounds the anti-static head 100 and prevents the head 100 from leaking soft X-rays, and Make the head 100 generate an appropriate amount of soft X-rays to control the control signal for ion generation and the power control part 300 that provides control voltage for the head 100. The anti-static head 100 and the protection part 200 are controlled through the AC high voltage control cable 10 It is connected to the power control unit 300 .

[0046] The soft X-ray protection unit 200 that prevents leakage of soft X-rays is made of a steel plate with a thickness of 1 mm. The anti-static device 1000 also includes an interlock switch 220 for controlling the operation of the above-mentioned power control un...

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Abstract

This invention refers to a method for making a device for neutralizing surface static electricity on liquid crystal and semiconductor chip using positive / negative ion generated by x-ray radiating air and soft x-ray tube thereof. Said invention contains head part for anti-static electricity of directly ionizing gas molecular, protector for protecting operator, power source control part for controlling filament current and target voltage used for controlling ion generation and soft x-ray tube for generating high energy x-ray. Said soft x-ray tube is made by firstly producing ceramic tube metal spray film, then coating anode material on beryllium window board, electroplating tungsten on beryllium window, finally making high vacuum brazing. Said invention can neutralize static electricity in combustible powder.

Description

technical field [0001] The invention relates to antistatic technology, more specifically, relates to an antistatic device using soft X-rays. Background technique [0002] In liquid crystal (LCD), plasma (PDP) and semiconductor manufacturing processes, the adsorption of fine dust due to static electricity and the destruction of the crystal lattice due to electrostatic discharge will reduce the yield of products, which will affect the output and lead to the increase of manufacturing costs. the main reason. [0003] In the manufacturing industry mentioned above, as anti-static countermeasures, ion grids or ion fans that generate ions based on corona discharge are currently mainly used, but the ions generated by these devices need to be convected by fans. Injection phenomenon, many (tens of thousands / cubic feet) metal particles are produced and attached to the end of the discharge electrode, and due to the forced convection of the fan, they fall off and adhere to the liquid cry...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J35/00H05G2/00H05G1/00H05F1/00H05F3/06
Inventor 李东勋
Owner 釜山科技园财团法人
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