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Molded fluoro elastomer with excellent detachability and process for producing the same

A technology for molded products and elastomers, which is applied in the direction of layered products, semiconductor/solid device parts, transportation and packaging, etc., to achieve the effect of improving plasma resistance and good bonding strength

Inactive Publication Date: 2003-06-11
DAIKIN IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, when the coated molded article described in this publication is used as a molded article such as a sealing material such as a plasma irradiation device for semiconductor manufacturing, it cannot have sufficient durability against harsh environments.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0133] Put 1 liter of pure water and an emulsifier in a stainless steel autoclave with an internal volume of 3 liters without an ignition source 10g, 0.09g of pH adjuster disodium hydrogen phosphate 12 water salt, after the system is fully replaced with nitrogen and degassed, the temperature is raised to 50°C while stirring at 600rpm, and tetrafluoroethylene (TFE) and perfluoro(methylethylene) are added base ether) (PMVE) mixed gas (TFE / PMVE=25 / 75 molar ratio), so that the internal pressure reaches 8.0kgf / cm 2 g. Then, 10 ml of an aqueous ammonium persulfate (APS) solution having a concentration of 527 mg / ml was injected under nitrogen pressure to start the reaction.

[0134] The polymerization reaction is carried out until the internal pressure drops to 7.0kgf / cm 2 G, press into CF under nitrogen pressure 2 = CFOCF 2 CF(CF 3 )OCF 2 CF 2 CN(CNVE) 3g. Then, respectively press TFE4.7g and PMVE5.3g under self-pressure to make the pressure reach 8.0kgf / cm 2 g. In the fu...

Embodiment 2～5

[0144] The crosslinked fluoroelastomer sheet prepared in Example 1 was roughened in the same manner as in Example 1, except that the irradiation time was changed as shown in Table 1. In addition, in Example 5, CF4 was used as the plasma gas.

[0145] The roughened fluorine-containing elastomer sheet was measured in the same manner as in Example 1 to measure the centerline average roughness Ra, peel strength and whiteness W (Lab). The results are shown in Table 1. Comparative example 1

Embodiment 6

[0151] The fluoroelastomer produced in Example 1, the crosslinking agent 2,2-bis(3,3-diaminophenyl)hexafluoropropane (hereinafter referred to as "bistetramine (bistetramine) AF") and the filler were oxidized Titanium was mixed in a weight ratio of 100 / 3 / 30, and prepared by open roll kneading to prepare a crosslinkable fluoroelastomer composition.

[0152] The fluoroelastomer composition was crosslinked at 200° C. for 15 to 20 minutes, and then crosslinked in an air furnace at 288 for 24 hours to produce a sheet with a thickness of 2 mm×width 10 mm×length 60 mm.

[0153] The cross-linked fluoroelastomer sheet was generated with oxygen plasma by means of a plasma irradiation device (PX-1000 manufactured by Samco Corporation) under the conditions of an air flow of 200 SCCM, a pressure of 300 mTorr, an output power of 400 W, and a frequency of 13.56 MHz. , irradiated for 15 minutes.

[0154] After irradiation, the plate was immersed in 5% HF aqueous solution for 15 minutes, then ...

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Abstract

A fluoroelastomer molding which is either a fluoroelastomer molding obtained by irradiating a molded fluoroelastomer with a plasma and having a center-line average surface roughness of 0.65 mu m or larger or a coated fluoroelastomer molding which is obtained by coating a fluoroelastomer base with a resin coating layer and has a low peel strength and a low etching rate during plasma irradiation. It is excellent not only in detachability but in whiteness. The molding is suitable for use as various sealing materials especially for semiconductor production apparatuses.

Description

technical field [0001] The present invention relates to a fluoroelastomer molded article having a surface excellent in separability, and more particularly to a sealing material. Background technique [0002] Fluorine-containing elastomers are excellent in heat resistance, plasma resistance, and etching gas resistance, and are particularly used as molded articles under severe service conditions. As such molded products, there are sealing materials such as O-rings and gaskets that require viscoelasticity, and they are usually used in a compressed state. [0003] When such a compressed state is maintained for a long time, the sealing material and the device surface are stuck together and it is difficult to peel off, and in extreme cases, a part of the sealing material may remain on the device surface. [0004] To improve the peelability of fluoroelastomers (rubber), especially to deal with the problems of mold release and tightness when taking out from the molding die, for exa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B1/00C08J3/28C08J5/00C08J7/00C08J7/04C08K3/22
CPCY10T428/24355C08J7/123C08J2327/12Y10T428/24802C08J7/00C08L27/18H01L23/29
Inventor 山外隆文东野克彦田中宏幸野口刚岸根充
Owner DAIKIN IND LTD
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