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Piezoelectric porcelain and method for preparation thereof and piezoelectric element

A technology of piezoelectric ceramics and manufacturing methods, which is applied in the direction of electrical components, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve the problems of low Curie temperature and large aging degradation of piezoelectric characteristics, and achieve the goal of burning Lower temperature, larger piezoelectric strain constant and mechanical strength, and less aging deterioration of properties

Inactive Publication Date: 2003-12-03
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with conventional piezoelectric ceramics, even if a large piezoelectric strain constant can be obtained, there is a problem that the Curie temperature is low and the aging deterioration of the piezoelectric characteristics is large.

Method used

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  • Piezoelectric porcelain and method for preparation thereof and piezoelectric element
  • Piezoelectric porcelain and method for preparation thereof and piezoelectric element
  • Piezoelectric porcelain and method for preparation thereof and piezoelectric element

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0036] The piezoelectric ceramic according to the first embodiment of the present invention contains the oxide represented by Chemical Formula 8 or 9 as a main component.

[0037] In Chemical Formula 8, A, a, b, c, and d are values ​​that respectively satisfy the following ranges, that is, a+b+c+d=1, 0.99≤A≤1.01, 0.15≤a+b≤0.5, 0.05≤b≤ 0.25, 0.2≤c≤0.5, 0.15≤d≤0.6. (Mg 1 / 3 Nb 2 / 3 ) in the composition of manganese and niobium, (Zn 1 / 3 Nb 2 / 3 ) in the composition of zinc and niobium, and the composition of oxygen are obtained stoichiometrically, but compositions deviated from stoichiometric may be used.

[0038] In addition, in Chemical Formula 9, A, B, a, b, c, and d are values ​​that respectively satisfy the following ranges, that is, a+b+c+d=1, 0.99≤A≤1.01, 0.005≤B≤0.1, 0.15≤ a+b≤0.5, 0.05≤b≤0.25, 0.2≤c≤0.5, 0.15≤d≤0.6. Me represents one of the group consisting of calcium, strontium and barium. (Mg 1 / 3 Nb 2 / 3 ) in the composition of manganese and niobium, (Zn 1 / 3 Nb ...

no. 2 approach

[0069] The piezoelectric ceramic according to the second embodiment of the present invention contains an oxide represented by Chemical Formula 10 as a main component.

[0070] In Chemical Formula 10, A, B, a, b, c, and d are values ​​that respectively satisfy the following ranges, that is, a+b+c+d=1, 0.99≤A / B≤1.005, 0.005≤a≤0.03, 0.05≤ b≤0.2, 0.36≤c≤0.49, 0.39≤d≤0.48. (Co 1 / 3 Nb 2 / 3 ) in the composition of cobalt and niobium, (Zn 1 / 3 Nb 2 / 3 ) in the composition of zinc and niobium, and the composition of oxygen are obtained stoichiometrically, but compositions deviated from stoichiometric may be used.

[0071] The oxide shown in Chemical Formula 10 has a perovskite structure, the lead position is on the so-called A site, cobalt (Co), niobium (Nb), zinc (Zn), titanium (Ti) and zirconium (Zr) is located on the so-called B site.

[0072] A / B shown in Chemical Formula 10 is a factor affecting sinterability. The reason why A / B is set to 0.99 or more is that when it is lower ...

no. 3 approach

[0085] The piezoelectric ceramic according to the third embodiment of the present invention contains an oxide represented by Chemical Formula 11 or Chemical Formula 12 as a main component.

[0086] In Chemical Formula 11, A, a, b, and c are values ​​that satisfy the following ranges respectively, that is, a+b+c=1, 0.99≤A≤1.005, 0.005≤a≤0.25, 0.35≤b≤0.50, 0.38≤c≤ 0.48. (Zn 1 / 3 Nb 2 / 3 ) in the composition of zinc and niobium, and the composition of oxygen are obtained stoichiometrically, but compositions deviated from stoichiometric may be used.

[0087] In addition, in Chemical Formula 12, A, B, a, b, and c are values ​​that respectively satisfy the following ranges, that is, a+b+c=1, 0.99≤A≤1.005, 0.005≤B≤0.1, 0.05≤a≤0.25, 0.35≤b≤0.50, 0.38≤c≤0.48. Me represents at least one selected from calcium, strontium and barium. The composition of oxygen is always obtained stoichiometrically, but a composition deviating from stoichiometry is also possible.

[0088] The oxide shown...

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Abstract

Provided are a piezoelectric ceramic and a piezoelectric device having a larger piezoelectric strain constant and capable of being fired at a lower temperature. A main component of PbAÄ(Mg1 / 3Nb2 / 3)a(Zn1 / 3Nb2 / 3)bTicZrdÜO3 (a+b+c+d=1, 0.99< / =A< / = 1.01, 0.15< / =a+b< / =0.5, 0.05< / =b< / =0.25, 0.2< / =c< / =0.5, 0.15< / =d< / =0.6) and 0.01 mass% to 0.8 mass% inclusive of at least one kind selected from the group consisting of Fe, Co, Ni and Cu in the form of oxide per 1 mol of the main component as a first sub-component are comprised. Thereby, a larger piezoelectric strain constant can be obtained, and a firing temperature can be reduced. In the main component, a part of Pb may be replaced with at least one kind selected from the group consisting of Ca, Sr and Ba. Further, as a second sub-component, 0.05 mass% to 1.0 mass% inclusive of at least one kind selected from the group consisting of Sb, Nb and Ta in the form of oxide per 1 mol of the main component may be comprised.

Description

technical field [0001] The present invention relates to piezoelectric ceramics suitable for actuators, piezoelectric buzzers, sounding bodies, sensors, etc., their manufacturing methods, and piezoelectric elements. Background technique [0002] Conventionally, there have been actuators that utilize displacement by the piezoelectric effect as a mechanical drive source. In particular, multilayer actuators, in which piezoelectric layers and internal electrodes are laminated, have less power consumption and higher heat generation than electromagnetic actuators, and can be miniaturized and lightweight, so they have been used in fiber weaving in recent years. Machine needle selection control and other fields. [0003] For piezoelectric ceramics used in these actuators, piezoelectric characteristics, especially piezoelectric strain constants, are required to be large. As a piezoelectric ceramic that can obtain a large piezoelectric strain constant, for example, lead titanate (PbT...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/493H01L41/083H01L41/187
CPCC04B2235/3206C04B2235/3281C04B2235/3201C04B2235/3284H01L41/187C04B2235/3215C04B35/493C04B2235/79H01L41/083C04B2235/3251C04B2235/3213C04B2235/77C04B2235/3294C04B2235/3279C04B2235/96C04B2235/656C04B2235/3272C04B35/6262C04B2235/3275H10N30/50H10N30/853C04B35/491
Inventor 佐佐木诚志
Owner TDK CORPARATION
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