Aluminum nitride monocrystal film and method of preparing the same
A technology of single crystal thin film and aluminum nitride, which is applied in semiconductor/solid-state device manufacturing, ion implantation plating, coating, etc., and can solve problems such as many defects in the film and difficulty in obtaining high-quality single crystal thin film
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[0028] An aluminum nitride film on a magnesium oxide single crystal substrate includes a magnesium oxide single crystal substrate substrate 2 and an aluminum nitride film 1. The crystal lattice structure of the magnesium oxide single crystal substrate 2 is cubic crystal, and the lattice parameter α MgO =4.201; The crystal of aluminum nitride has a hexagonal structure, and the lattice parameter is α AlN = 3lll, c AlN =4.979. Although the lattice structures of aluminum nitride and magnesium oxide are not the same, the [101] crystal orientation of the aluminum nitride film 1 and the [001] crystal orientation of the magnesium oxide single crystal substrate 2 have a good match.
[0029] A method for growing an aluminum nitride film 1 on a magnesium oxide single crystal substrate 2 by using a radio frequency magnetron sputtering method, and the steps are as follows:
[0030] (a) Cleaning of magnesium oxide single crystal substrate: first put the magnesium oxide single crystal substra...
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